JPS62144983U - - Google Patents
Info
- Publication number
- JPS62144983U JPS62144983U JP3164686U JP3164686U JPS62144983U JP S62144983 U JPS62144983 U JP S62144983U JP 3164686 U JP3164686 U JP 3164686U JP 3164686 U JP3164686 U JP 3164686U JP S62144983 U JPS62144983 U JP S62144983U
- Authority
- JP
- Japan
- Prior art keywords
- cover
- raw material
- material elements
- groove
- evaporating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 11
- 239000002994 raw material Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 3
- 229910052582 BN Inorganic materials 0.000 claims 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910002804 graphite Inorganic materials 0.000 claims 2
- 239000010439 graphite Substances 0.000 claims 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims 2
- 230000008020 evaporation Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3164686U JPS62144983U (enrdf_load_stackoverflow) | 1986-03-05 | 1986-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3164686U JPS62144983U (enrdf_load_stackoverflow) | 1986-03-05 | 1986-03-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62144983U true JPS62144983U (enrdf_load_stackoverflow) | 1987-09-12 |
Family
ID=30837574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3164686U Pending JPS62144983U (enrdf_load_stackoverflow) | 1986-03-05 | 1986-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62144983U (enrdf_load_stackoverflow) |
-
1986
- 1986-03-05 JP JP3164686U patent/JPS62144983U/ja active Pending