JPS6346464U - - Google Patents

Info

Publication number
JPS6346464U
JPS6346464U JP14043686U JP14043686U JPS6346464U JP S6346464 U JPS6346464 U JP S6346464U JP 14043686 U JP14043686 U JP 14043686U JP 14043686 U JP14043686 U JP 14043686U JP S6346464 U JPS6346464 U JP S6346464U
Authority
JP
Japan
Prior art keywords
target material
sic
deposited
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14043686U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0343230Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14043686U priority Critical patent/JPH0343230Y2/ja
Publication of JPS6346464U publication Critical patent/JPS6346464U/ja
Application granted granted Critical
Publication of JPH0343230Y2 publication Critical patent/JPH0343230Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP14043686U 1986-09-12 1986-09-12 Expired JPH0343230Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14043686U JPH0343230Y2 (enrdf_load_stackoverflow) 1986-09-12 1986-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14043686U JPH0343230Y2 (enrdf_load_stackoverflow) 1986-09-12 1986-09-12

Publications (2)

Publication Number Publication Date
JPS6346464U true JPS6346464U (enrdf_load_stackoverflow) 1988-03-29
JPH0343230Y2 JPH0343230Y2 (enrdf_load_stackoverflow) 1991-09-10

Family

ID=31047287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14043686U Expired JPH0343230Y2 (enrdf_load_stackoverflow) 1986-09-12 1986-09-12

Country Status (1)

Country Link
JP (1) JPH0343230Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0343230Y2 (enrdf_load_stackoverflow) 1991-09-10

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