JPS62203262U - - Google Patents

Info

Publication number
JPS62203262U
JPS62203262U JP9235986U JP9235986U JPS62203262U JP S62203262 U JPS62203262 U JP S62203262U JP 9235986 U JP9235986 U JP 9235986U JP 9235986 U JP9235986 U JP 9235986U JP S62203262 U JPS62203262 U JP S62203262U
Authority
JP
Japan
Prior art keywords
vapor deposition
deposition crucible
refractory material
sic
carbon material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9235986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH024123Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9235986U priority Critical patent/JPH024123Y2/ja
Publication of JPS62203262U publication Critical patent/JPS62203262U/ja
Application granted granted Critical
Publication of JPH024123Y2 publication Critical patent/JPH024123Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9235986U 1986-06-17 1986-06-17 Expired JPH024123Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9235986U JPH024123Y2 (enrdf_load_stackoverflow) 1986-06-17 1986-06-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9235986U JPH024123Y2 (enrdf_load_stackoverflow) 1986-06-17 1986-06-17

Publications (2)

Publication Number Publication Date
JPS62203262U true JPS62203262U (enrdf_load_stackoverflow) 1987-12-25
JPH024123Y2 JPH024123Y2 (enrdf_load_stackoverflow) 1990-01-31

Family

ID=30953996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9235986U Expired JPH024123Y2 (enrdf_load_stackoverflow) 1986-06-17 1986-06-17

Country Status (1)

Country Link
JP (1) JPH024123Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH024123Y2 (enrdf_load_stackoverflow) 1990-01-31

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