JPS62118169U - - Google Patents
Info
- Publication number
- JPS62118169U JPS62118169U JP432486U JP432486U JPS62118169U JP S62118169 U JPS62118169 U JP S62118169U JP 432486 U JP432486 U JP 432486U JP 432486 U JP432486 U JP 432486U JP S62118169 U JPS62118169 U JP S62118169U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- plate member
- inclined plate
- cover member
- metal evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 238000001883 metal evaporation Methods 0.000 claims 5
- 238000005229 chemical vapour deposition Methods 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910002804 graphite Inorganic materials 0.000 claims 1
- 239000010439 graphite Substances 0.000 claims 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP432486U JPS62118169U (enrdf_load_stackoverflow) | 1986-01-16 | 1986-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP432486U JPS62118169U (enrdf_load_stackoverflow) | 1986-01-16 | 1986-01-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62118169U true JPS62118169U (enrdf_load_stackoverflow) | 1987-07-27 |
Family
ID=30784887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP432486U Pending JPS62118169U (enrdf_load_stackoverflow) | 1986-01-16 | 1986-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62118169U (enrdf_load_stackoverflow) |
-
1986
- 1986-01-16 JP JP432486U patent/JPS62118169U/ja active Pending
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