JPS634643B2 - - Google Patents
Info
- Publication number
- JPS634643B2 JPS634643B2 JP56058879A JP5887981A JPS634643B2 JP S634643 B2 JPS634643 B2 JP S634643B2 JP 56058879 A JP56058879 A JP 56058879A JP 5887981 A JP5887981 A JP 5887981A JP S634643 B2 JPS634643 B2 JP S634643B2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- hair
- stage plate
- axis direction
- subject
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007689 inspection Methods 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 210000004209 hair Anatomy 0.000 description 48
- 230000003287 optical effect Effects 0.000 description 6
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 210000002615 epidermis Anatomy 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000003699 hair surface Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
- G01B5/285—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces for controlling eveness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56058879A JPS57173706A (en) | 1981-04-17 | 1981-04-17 | Device for checking linear body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56058879A JPS57173706A (en) | 1981-04-17 | 1981-04-17 | Device for checking linear body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57173706A JPS57173706A (en) | 1982-10-26 |
| JPS634643B2 true JPS634643B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-01-29 |
Family
ID=13097038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56058879A Granted JPS57173706A (en) | 1981-04-17 | 1981-04-17 | Device for checking linear body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57173706A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62128356U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-02-07 | 1987-08-14 | ||
| US8577119B2 (en) | 2006-02-24 | 2013-11-05 | Hitachi High-Technologies Corporation | Wafer surface observing method and apparatus |
| JP5085953B2 (ja) * | 2006-02-24 | 2012-11-28 | 株式会社日立ハイテクノロジーズ | 表面検査装置 |
-
1981
- 1981-04-17 JP JP56058879A patent/JPS57173706A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57173706A (en) | 1982-10-26 |