JPS57173706A - Device for checking linear body - Google Patents
Device for checking linear bodyInfo
- Publication number
- JPS57173706A JPS57173706A JP56058879A JP5887981A JPS57173706A JP S57173706 A JPS57173706 A JP S57173706A JP 56058879 A JP56058879 A JP 56058879A JP 5887981 A JP5887981 A JP 5887981A JP S57173706 A JPS57173706 A JP S57173706A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- handle
- moved
- hair
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
- G01B5/285—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces for controlling eveness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56058879A JPS57173706A (en) | 1981-04-17 | 1981-04-17 | Device for checking linear body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56058879A JPS57173706A (en) | 1981-04-17 | 1981-04-17 | Device for checking linear body |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57173706A true JPS57173706A (en) | 1982-10-26 |
JPS634643B2 JPS634643B2 (ja) | 1988-01-29 |
Family
ID=13097038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56058879A Granted JPS57173706A (en) | 1981-04-17 | 1981-04-17 | Device for checking linear body |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57173706A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62128356U (ja) * | 1986-02-07 | 1987-08-14 | ||
JP2007256272A (ja) * | 2006-02-24 | 2007-10-04 | Hitachi High-Technologies Corp | 表面検査装置 |
US8577119B2 (en) | 2006-02-24 | 2013-11-05 | Hitachi High-Technologies Corporation | Wafer surface observing method and apparatus |
-
1981
- 1981-04-17 JP JP56058879A patent/JPS57173706A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62128356U (ja) * | 1986-02-07 | 1987-08-14 | ||
JP2007256272A (ja) * | 2006-02-24 | 2007-10-04 | Hitachi High-Technologies Corp | 表面検査装置 |
US8577119B2 (en) | 2006-02-24 | 2013-11-05 | Hitachi High-Technologies Corporation | Wafer surface observing method and apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS634643B2 (ja) | 1988-01-29 |
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