JPS6345732Y2 - - Google Patents
Info
- Publication number
- JPS6345732Y2 JPS6345732Y2 JP14152082U JP14152082U JPS6345732Y2 JP S6345732 Y2 JPS6345732 Y2 JP S6345732Y2 JP 14152082 U JP14152082 U JP 14152082U JP 14152082 U JP14152082 U JP 14152082U JP S6345732 Y2 JPS6345732 Y2 JP S6345732Y2
- Authority
- JP
- Japan
- Prior art keywords
- container
- gas supply
- gas
- insulating
- emitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 29
- 239000012212 insulator Substances 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 5
- 238000000605 extraction Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14152082U JPS5948738U (ja) | 1982-09-18 | 1982-09-18 | イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14152082U JPS5948738U (ja) | 1982-09-18 | 1982-09-18 | イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5948738U JPS5948738U (ja) | 1984-03-31 |
| JPS6345732Y2 true JPS6345732Y2 (enrdf_load_stackoverflow) | 1988-11-28 |
Family
ID=30316501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14152082U Granted JPS5948738U (ja) | 1982-09-18 | 1982-09-18 | イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5948738U (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5809890B2 (ja) | 2011-09-05 | 2015-11-11 | 株式会社日立ハイテクノロジーズ | イオンビーム装置 |
| JP7494386B2 (ja) * | 2021-04-15 | 2024-06-03 | 株式会社日立ハイテク | 荷電粒子線装置 |
-
1982
- 1982-09-18 JP JP14152082U patent/JPS5948738U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5948738U (ja) | 1984-03-31 |
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