JPS6345732Y2 - - Google Patents
Info
- Publication number
- JPS6345732Y2 JPS6345732Y2 JP14152082U JP14152082U JPS6345732Y2 JP S6345732 Y2 JPS6345732 Y2 JP S6345732Y2 JP 14152082 U JP14152082 U JP 14152082U JP 14152082 U JP14152082 U JP 14152082U JP S6345732 Y2 JPS6345732 Y2 JP S6345732Y2
- Authority
- JP
- Japan
- Prior art keywords
- container
- gas supply
- gas
- insulating
- emitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 29
- 239000012212 insulator Substances 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 5
- 238000000605 extraction Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14152082U JPS5948738U (ja) | 1982-09-18 | 1982-09-18 | イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14152082U JPS5948738U (ja) | 1982-09-18 | 1982-09-18 | イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5948738U JPS5948738U (ja) | 1984-03-31 |
| JPS6345732Y2 true JPS6345732Y2 (enrdf_load_stackoverflow) | 1988-11-28 |
Family
ID=30316501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14152082U Granted JPS5948738U (ja) | 1982-09-18 | 1982-09-18 | イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5948738U (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5809890B2 (ja) * | 2011-09-05 | 2015-11-11 | 株式会社日立ハイテクノロジーズ | イオンビーム装置 |
| WO2022219790A1 (ja) * | 2021-04-15 | 2022-10-20 | 株式会社日立ハイテク | 荷電粒子線装置 |
-
1982
- 1982-09-18 JP JP14152082U patent/JPS5948738U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5948738U (ja) | 1984-03-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5442193A (en) | Microelectronic field emission device with breakdown inhibiting insulated gate electrode | |
| JPS6345732Y2 (enrdf_load_stackoverflow) | ||
| US3973158A (en) | Device comprising an ion source in which the ions are accelerated in a direction perpendicular to a magnetic field of high intensity | |
| US20020047545A1 (en) | Particle accelerator | |
| US3895254A (en) | Charged particle accelerator with integral transformer and shielding means | |
| US2259451A (en) | Method and apparatus for electric discharge | |
| JP2603722B2 (ja) | 高周波誘導結合プラズマ質量分析装置 | |
| JPS6293834A (ja) | イオン源 | |
| JP2929768B2 (ja) | 円筒型プラズマ発生装置 | |
| GB887251A (en) | Improvements in or relating to ionic vacuum pump devices | |
| JPH08124514A (ja) | 高電圧絶縁装置 | |
| JPH035081Y2 (enrdf_load_stackoverflow) | ||
| JPH0421297B2 (enrdf_load_stackoverflow) | ||
| JPS5740845A (en) | Ion beam generator | |
| JPH0528720Y2 (enrdf_load_stackoverflow) | ||
| JPH0521245Y2 (enrdf_load_stackoverflow) | ||
| JPH0650110B2 (ja) | Ｒｆ型イオン源 | |
| JPH0521246Y2 (enrdf_load_stackoverflow) | ||
| JP3167207B2 (ja) | イオン加速装置 | |
| JPH0719083Y2 (ja) | イオン源 | |
| JPS58161234A (ja) | 電界放出型荷電粒子発生装置 | |
| SE9502136D0 (sv) | Elektrisk isolator | |
| JPS61200699A (ja) | 荷電粒子加速装置 | |
| JP3300497B2 (ja) | ジャイロトロン装置 | |
| JPH05135899A (ja) | 直流電圧型加速器の加速管 |