JPS6344438U - - Google Patents
Info
- Publication number
- JPS6344438U JPS6344438U JP1986136656U JP13665686U JPS6344438U JP S6344438 U JPS6344438 U JP S6344438U JP 1986136656 U JP1986136656 U JP 1986136656U JP 13665686 U JP13665686 U JP 13665686U JP S6344438 U JPS6344438 U JP S6344438U
- Authority
- JP
- Japan
- Prior art keywords
- film
- mask
- wafer
- mark
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 239000006096 absorbing agent Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 7
- 238000002834 transmittance Methods 0.000 claims 3
- 229910052582 BN Inorganic materials 0.000 claims 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical group N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986136656U JPS6344438U (enExample) | 1986-09-08 | 1986-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986136656U JPS6344438U (enExample) | 1986-09-08 | 1986-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6344438U true JPS6344438U (enExample) | 1988-03-25 |
Family
ID=31039979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986136656U Pending JPS6344438U (enExample) | 1986-09-08 | 1986-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6344438U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0245911A (ja) * | 1988-08-08 | 1990-02-15 | Nippon Telegr & Teleph Corp <Ntt> | Ｘ線露光マスクとその製造方法 |
-
1986
- 1986-09-08 JP JP1986136656U patent/JPS6344438U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0245911A (ja) * | 1988-08-08 | 1990-02-15 | Nippon Telegr & Teleph Corp <Ntt> | Ｘ線露光マスクとその製造方法 |
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