JPS62188771U - - Google Patents
Info
- Publication number
- JPS62188771U JPS62188771U JP1986077401U JP7740186U JPS62188771U JP S62188771 U JPS62188771 U JP S62188771U JP 1986077401 U JP1986077401 U JP 1986077401U JP 7740186 U JP7740186 U JP 7740186U JP S62188771 U JPS62188771 U JP S62188771U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- light
- shielding film
- photomask blank
- exposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986077401U JPS62188771U (enExample) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986077401U JPS62188771U (enExample) | 1986-05-20 | 1986-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62188771U true JPS62188771U (enExample) | 1987-12-01 |
Family
ID=30925372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986077401U Pending JPS62188771U (enExample) | 1986-05-20 | 1986-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62188771U (enExample) |
-
1986
- 1986-05-20 JP JP1986077401U patent/JPS62188771U/ja active Pending