JPS63128723U - - Google Patents

Info

Publication number

JPS63128723U

JPS63128723U JP1987021624U JP2162487U JPS63128723U JP S63128723 U JPS63128723 U JP S63128723U JP 1987021624 U JP1987021624 U JP 1987021624U JP 2162487 U JP2162487 U JP 2162487U JP S63128723 U JPS63128723 U JP S63128723U

Authority

JP

Japan

Prior art keywords

protective film

rays

transmits

ray

mask

Prior art date

1987-02-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000001681 protective effect Effects 0.000 claims description 4
• 239000006096 absorbing agent Substances 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 239000000463 material Substances 0.000 claims 3
• 230000005855 radiation Effects 0.000 claims 1
• 229910052582 BN Inorganic materials 0.000 description 1
• PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
• 229910052581 Si3N4 Inorganic materials 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
• 239000010931 gold Substances 0.000 description 1
• 229910052737 gold Inorganic materials 0.000 description 1
• 229920001721 polyimide Polymers 0.000 description 1
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1