JPH01143127U - - Google Patents

Info

Publication number
JPH01143127U
JPH01143127U JP1988039172U JP3917288U JPH01143127U JP H01143127 U JPH01143127 U JP H01143127U JP 1988039172 U JP1988039172 U JP 1988039172U JP 3917288 U JP3917288 U JP 3917288U JP H01143127 U JPH01143127 U JP H01143127U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
bonding pad
polycrystalline silicon
insulating film
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988039172U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988039172U priority Critical patent/JPH01143127U/ja
Publication of JPH01143127U publication Critical patent/JPH01143127U/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/921Structures or relative sizes of bond pads
    • H10W72/922Bond pads being integral with underlying chip-level interconnections
    • H10W72/9226Bond pads being integral with underlying chip-level interconnections with via interconnections
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/921Structures or relative sizes of bond pads
    • H10W72/923Bond pads having multiple stacked layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/931Shapes of bond pads
    • H10W72/934Cross-sectional shape, i.e. in side view

Landscapes

  • Wire Bonding (AREA)
JP1988039172U 1988-03-24 1988-03-24 Pending JPH01143127U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988039172U JPH01143127U (enExample) 1988-03-24 1988-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988039172U JPH01143127U (enExample) 1988-03-24 1988-03-24

Publications (1)

Publication Number Publication Date
JPH01143127U true JPH01143127U (enExample) 1989-10-02

Family

ID=31265685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988039172U Pending JPH01143127U (enExample) 1988-03-24 1988-03-24

Country Status (1)

Country Link
JP (1) JPH01143127U (enExample)

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