JPS6361142U - - Google Patents
Info
- Publication number
- JPS6361142U JPS6361142U JP15641886U JP15641886U JPS6361142U JP S6361142 U JPS6361142 U JP S6361142U JP 15641886 U JP15641886 U JP 15641886U JP 15641886 U JP15641886 U JP 15641886U JP S6361142 U JPS6361142 U JP S6361142U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- net
- utility
- protection device
- transport path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15641886U JPS6361142U (enExample) | 1986-10-13 | 1986-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15641886U JPS6361142U (enExample) | 1986-10-13 | 1986-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6361142U true JPS6361142U (enExample) | 1988-04-22 |
Family
ID=31078015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15641886U Pending JPS6361142U (enExample) | 1986-10-13 | 1986-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6361142U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013157517A (ja) * | 2012-01-31 | 2013-08-15 | Lintec Corp | シート貼付装置および貼付方法 |
-
1986
- 1986-10-13 JP JP15641886U patent/JPS6361142U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013157517A (ja) * | 2012-01-31 | 2013-08-15 | Lintec Corp | シート貼付装置および貼付方法 |