JPS6343891B2 - - Google Patents

Info

Publication number
JPS6343891B2
JPS6343891B2 JP57117210A JP11721082A JPS6343891B2 JP S6343891 B2 JPS6343891 B2 JP S6343891B2 JP 57117210 A JP57117210 A JP 57117210A JP 11721082 A JP11721082 A JP 11721082A JP S6343891 B2 JPS6343891 B2 JP S6343891B2
Authority
JP
Japan
Prior art keywords
groove
film
metal film
forming
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57117210A
Other languages
English (en)
Japanese (ja)
Other versions
JPS598354A (ja
Inventor
Tadashi Sugaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP11721082A priority Critical patent/JPS598354A/ja
Publication of JPS598354A publication Critical patent/JPS598354A/ja
Publication of JPS6343891B2 publication Critical patent/JPS6343891B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP11721082A 1982-07-06 1982-07-06 金属膜配線の形成方法 Granted JPS598354A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11721082A JPS598354A (ja) 1982-07-06 1982-07-06 金属膜配線の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11721082A JPS598354A (ja) 1982-07-06 1982-07-06 金属膜配線の形成方法

Publications (2)

Publication Number Publication Date
JPS598354A JPS598354A (ja) 1984-01-17
JPS6343891B2 true JPS6343891B2 (enrdf_load_stackoverflow) 1988-09-01

Family

ID=14706111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11721082A Granted JPS598354A (ja) 1982-07-06 1982-07-06 金属膜配線の形成方法

Country Status (1)

Country Link
JP (1) JPS598354A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62225341A (ja) * 1986-03-27 1987-10-03 住友金属工業株式会社 接着用塗装鋼板
CN101950748B (zh) * 2005-01-28 2013-06-12 株式会社半导体能源研究所 半导体器件和制造它的方法
JP2010016240A (ja) * 2008-07-04 2010-01-21 Panasonic Corp インダクタとその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3841626A (en) * 1973-03-01 1974-10-15 Miller Printing Machinery Co Sheet feeding apparatus

Also Published As

Publication number Publication date
JPS598354A (ja) 1984-01-17

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