JPS6343862B2 - - Google Patents

Info

Publication number
JPS6343862B2
JPS6343862B2 JP54090347A JP9034779A JPS6343862B2 JP S6343862 B2 JPS6343862 B2 JP S6343862B2 JP 54090347 A JP54090347 A JP 54090347A JP 9034779 A JP9034779 A JP 9034779A JP S6343862 B2 JPS6343862 B2 JP S6343862B2
Authority
JP
Japan
Prior art keywords
alkaline earth
earth metal
metal oxide
photoresist
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54090347A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5615527A (en
Inventor
Kazuo Sunahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9034779A priority Critical patent/JPS5615527A/ja
Publication of JPS5615527A publication Critical patent/JPS5615527A/ja
Publication of JPS6343862B2 publication Critical patent/JPS6343862B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Solid Thermionic Cathode (AREA)
JP9034779A 1979-07-18 1979-07-18 Directly heating type cathode and its manufacture Granted JPS5615527A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9034779A JPS5615527A (en) 1979-07-18 1979-07-18 Directly heating type cathode and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9034779A JPS5615527A (en) 1979-07-18 1979-07-18 Directly heating type cathode and its manufacture

Publications (2)

Publication Number Publication Date
JPS5615527A JPS5615527A (en) 1981-02-14
JPS6343862B2 true JPS6343862B2 (enrdf_load_stackoverflow) 1988-09-01

Family

ID=13995988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9034779A Granted JPS5615527A (en) 1979-07-18 1979-07-18 Directly heating type cathode and its manufacture

Country Status (1)

Country Link
JP (1) JPS5615527A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60241150A (ja) * 1984-05-16 1985-11-30 Fanuc Ltd デ−タ転送装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5922335B2 (ja) * 1976-01-28 1984-05-25 株式会社日立製作所 直熱形陰極構体

Also Published As

Publication number Publication date
JPS5615527A (en) 1981-02-14

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