JPS6340868B2 - - Google Patents

Info

Publication number
JPS6340868B2
JPS6340868B2 JP59221180A JP22118084A JPS6340868B2 JP S6340868 B2 JPS6340868 B2 JP S6340868B2 JP 59221180 A JP59221180 A JP 59221180A JP 22118084 A JP22118084 A JP 22118084A JP S6340868 B2 JPS6340868 B2 JP S6340868B2
Authority
JP
Japan
Prior art keywords
etching solution
ferric
etching
ferric salt
salt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59221180A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61104092A (ja
Inventor
Hideo Hayashi
Tetsuharu Hayakawa
Takashi Deo
Noboru Idemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuyama Corp
Proterial Ltd
Original Assignee
Tokuyama Corp
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuyama Corp, Sumitomo Special Metals Co Ltd filed Critical Tokuyama Corp
Priority to JP22118084A priority Critical patent/JPS61104092A/ja
Publication of JPS61104092A publication Critical patent/JPS61104092A/ja
Publication of JPS6340868B2 publication Critical patent/JPS6340868B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/46—Regeneration of etching compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
JP22118084A 1984-10-23 1984-10-23 エツチング液の再生方法 Granted JPS61104092A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22118084A JPS61104092A (ja) 1984-10-23 1984-10-23 エツチング液の再生方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22118084A JPS61104092A (ja) 1984-10-23 1984-10-23 エツチング液の再生方法

Publications (2)

Publication Number Publication Date
JPS61104092A JPS61104092A (ja) 1986-05-22
JPS6340868B2 true JPS6340868B2 (enrdf_load_stackoverflow) 1988-08-12

Family

ID=16762730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22118084A Granted JPS61104092A (ja) 1984-10-23 1984-10-23 エツチング液の再生方法

Country Status (1)

Country Link
JP (1) JPS61104092A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5035778A (en) * 1989-05-12 1991-07-30 International Business Machines Corporation Regeneration of spent ferric chloride etchants
JPH06240475A (ja) * 1993-02-16 1994-08-30 Nittetsu Mining Co Ltd ニッケルを含む塩化鉄系のエッチング液の処理方法
JP3773198B2 (ja) * 2002-12-25 2006-05-10 株式会社前川製作所 食品解凍方法及びその装置
CN104204300B (zh) 2012-03-30 2019-06-14 阿克佐诺贝尔化学国际公司 有机铁盐水溶液的稳定化
CN104131285B (zh) * 2013-05-03 2016-08-31 宁波东盛集成电路元件有限公司 三氯化铁蚀刻废液的回收方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3761369A (en) * 1971-10-18 1973-09-25 Electrodies Inc Process for the electrolytic reclamation of spent etching fluids

Also Published As

Publication number Publication date
JPS61104092A (ja) 1986-05-22

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