JPS6340018B2 - - Google Patents
Info
- Publication number
- JPS6340018B2 JPS6340018B2 JP60278916A JP27891685A JPS6340018B2 JP S6340018 B2 JPS6340018 B2 JP S6340018B2 JP 60278916 A JP60278916 A JP 60278916A JP 27891685 A JP27891685 A JP 27891685A JP S6340018 B2 JPS6340018 B2 JP S6340018B2
- Authority
- JP
- Japan
- Prior art keywords
- deflection
- charged particle
- amount
- particle beam
- main lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Particle Accelerators (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60278916A JPS61147525A (ja) | 1985-12-13 | 1985-12-13 | 荷電粒子線応用装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60278916A JPS61147525A (ja) | 1985-12-13 | 1985-12-13 | 荷電粒子線応用装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61147525A JPS61147525A (ja) | 1986-07-05 |
| JPS6340018B2 true JPS6340018B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-08-09 |
Family
ID=17603874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60278916A Granted JPS61147525A (ja) | 1985-12-13 | 1985-12-13 | 荷電粒子線応用装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61147525A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5277573A (en) * | 1975-12-24 | 1977-06-30 | Hitachi Ltd | Magnetic field generating device |
| JPS5693253A (en) * | 1979-12-27 | 1981-07-28 | Fujitsu Ltd | Electron beam deflecting device |
-
1985
- 1985-12-13 JP JP60278916A patent/JPS61147525A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61147525A (ja) | 1986-07-05 |
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