JPS6338250U - - Google Patents

Info

Publication number
JPS6338250U
JPS6338250U JP13231686U JP13231686U JPS6338250U JP S6338250 U JPS6338250 U JP S6338250U JP 13231686 U JP13231686 U JP 13231686U JP 13231686 U JP13231686 U JP 13231686U JP S6338250 U JPS6338250 U JP S6338250U
Authority
JP
Japan
Prior art keywords
electron beam
photographing
objective lens
imaging
excitation current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13231686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13231686U priority Critical patent/JPS6338250U/ja
Publication of JPS6338250U publication Critical patent/JPS6338250U/ja
Pending legal-status Critical Current

Links

JP13231686U 1986-08-29 1986-08-29 Pending JPS6338250U (ar)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13231686U JPS6338250U (ar) 1986-08-29 1986-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13231686U JPS6338250U (ar) 1986-08-29 1986-08-29

Publications (1)

Publication Number Publication Date
JPS6338250U true JPS6338250U (ar) 1988-03-11

Family

ID=31031584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13231686U Pending JPS6338250U (ar) 1986-08-29 1986-08-29

Country Status (1)

Country Link
JP (1) JPS6338250U (ar)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0313302U (ar) * 1989-06-23 1991-02-12

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4964364A (ar) * 1972-10-21 1974-06-21
JPS5569949A (en) * 1978-11-22 1980-05-27 Hitachi Ltd Method of obtaining the proper focal point of electron microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4964364A (ar) * 1972-10-21 1974-06-21
JPS5569949A (en) * 1978-11-22 1980-05-27 Hitachi Ltd Method of obtaining the proper focal point of electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0313302U (ar) * 1989-06-23 1991-02-12

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