JPS6336683Y2 - - Google Patents
Info
- Publication number
- JPS6336683Y2 JPS6336683Y2 JP1983099210U JP9921083U JPS6336683Y2 JP S6336683 Y2 JPS6336683 Y2 JP S6336683Y2 JP 1983099210 U JP1983099210 U JP 1983099210U JP 9921083 U JP9921083 U JP 9921083U JP S6336683 Y2 JPS6336683 Y2 JP S6336683Y2
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- gap
- contact surface
- mask pattern
- reference end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007689 inspection Methods 0.000 claims description 20
- 238000005259 measurement Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 230000002950 deficient Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229920002160 Celluloid Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983099210U JPS606223U (ja) | 1983-06-27 | 1983-06-27 | フオトマスク検査機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983099210U JPS606223U (ja) | 1983-06-27 | 1983-06-27 | フオトマスク検査機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS606223U JPS606223U (ja) | 1985-01-17 |
| JPS6336683Y2 true JPS6336683Y2 (enrdf_load_stackoverflow) | 1988-09-28 |
Family
ID=30235213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1983099210U Granted JPS606223U (ja) | 1983-06-27 | 1983-06-27 | フオトマスク検査機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS606223U (enrdf_load_stackoverflow) |
-
1983
- 1983-06-27 JP JP1983099210U patent/JPS606223U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS606223U (ja) | 1985-01-17 |
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