JPS6336521A - 非晶質薄膜の形成方法 - Google Patents
非晶質薄膜の形成方法Info
- Publication number
- JPS6336521A JPS6336521A JP61179148A JP17914886A JPS6336521A JP S6336521 A JPS6336521 A JP S6336521A JP 61179148 A JP61179148 A JP 61179148A JP 17914886 A JP17914886 A JP 17914886A JP S6336521 A JPS6336521 A JP S6336521A
- Authority
- JP
- Japan
- Prior art keywords
- reaction gas
- type layer
- plasma
- gas pressure
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 16
- 239000012495 reaction gas Substances 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims description 12
- 239000010408 film Substances 0.000 abstract description 19
- 230000015572 biosynthetic process Effects 0.000 abstract description 12
- 239000007789 gas Substances 0.000 abstract description 9
- 238000006243 chemical reaction Methods 0.000 abstract description 8
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract description 6
- 229910000077 silane Inorganic materials 0.000 abstract description 6
- 238000005268 plasma chemical vapour deposition Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- 230000001052 transient effect Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 108091008695 photoreceptors Proteins 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Photovoltaic Devices (AREA)
- Silicon Compounds (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61179148A JPS6336521A (ja) | 1986-07-30 | 1986-07-30 | 非晶質薄膜の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61179148A JPS6336521A (ja) | 1986-07-30 | 1986-07-30 | 非晶質薄膜の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6336521A true JPS6336521A (ja) | 1988-02-17 |
| JPH0573248B2 JPH0573248B2 (enrdf_load_stackoverflow) | 1993-10-14 |
Family
ID=16060803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61179148A Granted JPS6336521A (ja) | 1986-07-30 | 1986-07-30 | 非晶質薄膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6336521A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998007895A1 (fr) * | 1996-08-19 | 1998-02-26 | Citizen Watch Co., Ltd. | Procede de formation d'un filme de carbone dur sur la surface circonferentielle interne d'une bague de guidage |
| JP2008540070A (ja) * | 2005-04-29 | 2008-11-20 | ユニバーシティー オブ ロチェスター | 超薄多孔質ナノスケール膜、その製造方法および使用 |
-
1986
- 1986-07-30 JP JP61179148A patent/JPS6336521A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998007895A1 (fr) * | 1996-08-19 | 1998-02-26 | Citizen Watch Co., Ltd. | Procede de formation d'un filme de carbone dur sur la surface circonferentielle interne d'une bague de guidage |
| US6020036A (en) * | 1996-08-19 | 2000-02-01 | Citizen Watch Co., Ltd. | Method of forming hard carbon film over the inner surface of guide bush |
| JP2008540070A (ja) * | 2005-04-29 | 2008-11-20 | ユニバーシティー オブ ロチェスター | 超薄多孔質ナノスケール膜、その製造方法および使用 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0573248B2 (enrdf_load_stackoverflow) | 1993-10-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |