JPS6336101B2 - - Google Patents

Info

Publication number
JPS6336101B2
JPS6336101B2 JP2624485A JP2624485A JPS6336101B2 JP S6336101 B2 JPS6336101 B2 JP S6336101B2 JP 2624485 A JP2624485 A JP 2624485A JP 2624485 A JP2624485 A JP 2624485A JP S6336101 B2 JPS6336101 B2 JP S6336101B2
Authority
JP
Japan
Prior art keywords
pressure
tank
gas
valve
inert gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2624485A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60193232A (ja
Inventor
Michihisa Saito
Hiroshi Watabe
Yoshinobu Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2624485A priority Critical patent/JPS60193232A/ja
Publication of JPS60193232A publication Critical patent/JPS60193232A/ja
Publication of JPS6336101B2 publication Critical patent/JPS6336101B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • H01J9/395—Filling vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
JP2624485A 1985-02-15 1985-02-15 管球の不活性ガス封入装置 Granted JPS60193232A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2624485A JPS60193232A (ja) 1985-02-15 1985-02-15 管球の不活性ガス封入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2624485A JPS60193232A (ja) 1985-02-15 1985-02-15 管球の不活性ガス封入装置

Publications (2)

Publication Number Publication Date
JPS60193232A JPS60193232A (ja) 1985-10-01
JPS6336101B2 true JPS6336101B2 (enExample) 1988-07-19

Family

ID=12187880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2624485A Granted JPS60193232A (ja) 1985-02-15 1985-02-15 管球の不活性ガス封入装置

Country Status (1)

Country Link
JP (1) JPS60193232A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003144913A (ja) * 2001-11-13 2003-05-20 Ushio Inc 誘電体バリア放電ランプによる処理装置、および処理方法
KR20030097051A (ko) * 2002-06-18 2003-12-31 (주)아트램프 램프 제조공정에서의 압력 발생/제어 및 수명 예측 진단장치

Also Published As

Publication number Publication date
JPS60193232A (ja) 1985-10-01

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