JPS6334636B2 - - Google Patents

Info

Publication number
JPS6334636B2
JPS6334636B2 JP7844582A JP7844582A JPS6334636B2 JP S6334636 B2 JPS6334636 B2 JP S6334636B2 JP 7844582 A JP7844582 A JP 7844582A JP 7844582 A JP7844582 A JP 7844582A JP S6334636 B2 JPS6334636 B2 JP S6334636B2
Authority
JP
Japan
Prior art keywords
electrostrictive
internal electrode
electrostrictive material
calcined powder
electrode plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7844582A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58196069A (ja
Inventor
Takeshi Yano
Izumi Fukui
Takeshige Hamatsuki
Sadayuki Takahashi
Masatomo Yonezawa
Atsushi Ochi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP57078445A priority Critical patent/JPS58196069A/ja
Priority to EP83104556A priority patent/EP0094078B1/en
Priority to DE8383104556T priority patent/DE3378393D1/de
Priority to CA000427828A priority patent/CA1206193A/en
Priority to AU14422/83A priority patent/AU553391B2/en
Priority to US06/493,583 priority patent/US4523121A/en
Publication of JPS58196069A publication Critical patent/JPS58196069A/ja
Publication of JPS6334636B2 publication Critical patent/JPS6334636B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP57078445A 1982-05-11 1982-05-12 電歪効果素子 Granted JPS58196069A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP57078445A JPS58196069A (ja) 1982-05-12 1982-05-12 電歪効果素子
EP83104556A EP0094078B1 (en) 1982-05-11 1983-05-09 Multilayer electrostrictive element which withstands repeated application of pulses
DE8383104556T DE3378393D1 (en) 1982-05-11 1983-05-09 Multilayer electrostrictive element which withstands repeated application of pulses
CA000427828A CA1206193A (en) 1982-05-11 1983-05-10 Multilayer electrostrictive element which withstands repeated application of pulses
AU14422/83A AU553391B2 (en) 1982-05-11 1983-05-10 Multilayer electrostrictive element
US06/493,583 US4523121A (en) 1982-05-11 1983-05-11 Multilayer electrostrictive element which withstands repeated application of pulses

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57078445A JPS58196069A (ja) 1982-05-12 1982-05-12 電歪効果素子

Publications (2)

Publication Number Publication Date
JPS58196069A JPS58196069A (ja) 1983-11-15
JPS6334636B2 true JPS6334636B2 (enrdf_load_stackoverflow) 1988-07-11

Family

ID=13662235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57078445A Granted JPS58196069A (ja) 1982-05-11 1982-05-12 電歪効果素子

Country Status (1)

Country Link
JP (1) JPS58196069A (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0673387B2 (ja) * 1985-12-04 1994-09-14 日本電気株式会社 圧電変位素子
JPS63142875A (ja) * 1986-12-05 1988-06-15 Sumitomo Special Metals Co Ltd 圧電積層アクチユエ−タ−
DE69031839T2 (de) * 1989-04-07 1998-05-07 Mitsui Petrochemical Ind Geschichtete Keramikanordnung und Verfahren zur deren Herstellung
SG83626A1 (en) * 1989-07-11 2001-10-16 Seiko Epson Corp Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
JPH04299588A (ja) * 1991-03-28 1992-10-22 Nec Corp 電歪効果素子
EP0526048B1 (en) * 1991-07-18 1997-11-12 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia
JP2665106B2 (ja) * 1992-03-17 1997-10-22 日本碍子株式会社 圧電／電歪膜型素子
JP3106044B2 (ja) * 1992-12-04 2000-11-06 日本碍子株式会社 アクチュエータ及びそれを用いたインクジェットプリントヘッド
JP3120260B2 (ja) 1992-12-26 2000-12-25 日本碍子株式会社 圧電／電歪膜型素子
JP3432974B2 (ja) * 1995-10-13 2003-08-04 日本碍子株式会社 圧電／電歪膜型素子
JP3082731B2 (ja) * 1997-12-17 2000-08-28 日本電気株式会社 積層型圧電トランス及びその製造方法
US7651587B2 (en) 2005-08-11 2010-01-26 Applied Materials, Inc. Two-piece dome with separate RF coils for inductively coupled plasma reactors

Also Published As

Publication number Publication date
JPS58196069A (ja) 1983-11-15

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