JPS58196069A - 電歪効果素子 - Google Patents

電歪効果素子

Info

Publication number
JPS58196069A
JPS58196069A JP57078445A JP7844582A JPS58196069A JP S58196069 A JPS58196069 A JP S58196069A JP 57078445 A JP57078445 A JP 57078445A JP 7844582 A JP7844582 A JP 7844582A JP S58196069 A JPS58196069 A JP S58196069A
Authority
JP
Japan
Prior art keywords
electrostrictive
electrostrictive material
internal electrode
calcined powder
electrode plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57078445A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6334636B2 (enrdf_load_stackoverflow
Inventor
Takeshi Yano
健 矢野
Izumi Fukui
福井　泉
Takeshige Hamatsuki
浜付　武重
Sadayuki Takahashi
高橋　貞行
Masatomo Yonezawa
米沢　正智
Atsushi Ochi
篤 越智
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP57078445A priority Critical patent/JPS58196069A/ja
Priority to EP83104556A priority patent/EP0094078B1/en
Priority to DE8383104556T priority patent/DE3378393D1/de
Priority to CA000427828A priority patent/CA1206193A/en
Priority to AU14422/83A priority patent/AU553391B2/en
Priority to US06/493,583 priority patent/US4523121A/en
Publication of JPS58196069A publication Critical patent/JPS58196069A/ja
Publication of JPS6334636B2 publication Critical patent/JPS6334636B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP57078445A 1982-05-11 1982-05-12 電歪効果素子 Granted JPS58196069A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP57078445A JPS58196069A (ja) 1982-05-12 1982-05-12 電歪効果素子
EP83104556A EP0094078B1 (en) 1982-05-11 1983-05-09 Multilayer electrostrictive element which withstands repeated application of pulses
DE8383104556T DE3378393D1 (en) 1982-05-11 1983-05-09 Multilayer electrostrictive element which withstands repeated application of pulses
CA000427828A CA1206193A (en) 1982-05-11 1983-05-10 Multilayer electrostrictive element which withstands repeated application of pulses
AU14422/83A AU553391B2 (en) 1982-05-11 1983-05-10 Multilayer electrostrictive element
US06/493,583 US4523121A (en) 1982-05-11 1983-05-11 Multilayer electrostrictive element which withstands repeated application of pulses

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57078445A JPS58196069A (ja) 1982-05-12 1982-05-12 電歪効果素子

Publications (2)

Publication Number Publication Date
JPS58196069A true JPS58196069A (ja) 1983-11-15
JPS6334636B2 JPS6334636B2 (enrdf_load_stackoverflow) 1988-07-11

Family

ID=13662235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57078445A Granted JPS58196069A (ja) 1982-05-11 1982-05-12 電歪効果素子

Country Status (1)

Country Link
JP (1) JPS58196069A (enrdf_load_stackoverflow)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62132381A (ja) * 1985-12-04 1987-06-15 Nec Corp 圧電変位素子
JPS63142875A (ja) * 1986-12-05 1988-06-15 Sumitomo Special Metals Co Ltd 圧電積層アクチユエ−タ−
US5196757A (en) * 1991-03-28 1993-03-23 Nec Corporation Multilayer piezoelectric ceramic actuator
US5281888A (en) * 1992-03-17 1994-01-25 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element having auxiliary electrode disposed between piezoelectric/electrostrictive layer and substrate
EP0584842A3 (en) * 1989-04-07 1994-04-20 Mitsui Petrochemical Industries, Ltd. Laminated ceramic device and method of manufacturing the same
US5430344A (en) * 1991-07-18 1995-07-04 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia
US5617127A (en) * 1992-12-04 1997-04-01 Ngk Insulators, Ltd. Actuator having ceramic substrate with slit(s) and ink jet print head using the actuator
US5691593A (en) * 1989-07-11 1997-11-25 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
US5889352A (en) * 1995-10-13 1999-03-30 Ngk Insulators, Ltd. Piezo-electric/electrostrictive film type element
US6078127A (en) * 1997-12-17 2000-06-20 Nec Corporation Stacked piezoelectric transformer and method of manufacturing the same
US6396196B1 (en) 1992-12-26 2002-05-28 Ngk Insulators, Ltd. Piezoelectric device
US7651587B2 (en) 2005-08-11 2010-01-26 Applied Materials, Inc. Two-piece dome with separate RF coils for inductively coupled plasma reactors

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62132381A (ja) * 1985-12-04 1987-06-15 Nec Corp 圧電変位素子
JPS63142875A (ja) * 1986-12-05 1988-06-15 Sumitomo Special Metals Co Ltd 圧電積層アクチユエ−タ−
EP0584842A3 (en) * 1989-04-07 1994-04-20 Mitsui Petrochemical Industries, Ltd. Laminated ceramic device and method of manufacturing the same
US5691593A (en) * 1989-07-11 1997-11-25 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
US5196757A (en) * 1991-03-28 1993-03-23 Nec Corporation Multilayer piezoelectric ceramic actuator
US5691594A (en) * 1991-07-18 1997-11-25 Ngk Insulators, Ltd. Piezoelectric/electrostricitve element having ceramic substrate formed essentially of stabilized zirconia
US5430344A (en) * 1991-07-18 1995-07-04 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia
US5281888A (en) * 1992-03-17 1994-01-25 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element having auxiliary electrode disposed between piezoelectric/electrostrictive layer and substrate
US5617127A (en) * 1992-12-04 1997-04-01 Ngk Insulators, Ltd. Actuator having ceramic substrate with slit(s) and ink jet print head using the actuator
US6396196B1 (en) 1992-12-26 2002-05-28 Ngk Insulators, Ltd. Piezoelectric device
US5889352A (en) * 1995-10-13 1999-03-30 Ngk Insulators, Ltd. Piezo-electric/electrostrictive film type element
US6078127A (en) * 1997-12-17 2000-06-20 Nec Corporation Stacked piezoelectric transformer and method of manufacturing the same
US7651587B2 (en) 2005-08-11 2010-01-26 Applied Materials, Inc. Two-piece dome with separate RF coils for inductively coupled plasma reactors

Also Published As

Publication number Publication date
JPS6334636B2 (enrdf_load_stackoverflow) 1988-07-11

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