JPS6334316B2 - - Google Patents

Info

Publication number
JPS6334316B2
JPS6334316B2 JP16047583A JP16047583A JPS6334316B2 JP S6334316 B2 JPS6334316 B2 JP S6334316B2 JP 16047583 A JP16047583 A JP 16047583A JP 16047583 A JP16047583 A JP 16047583A JP S6334316 B2 JPS6334316 B2 JP S6334316B2
Authority
JP
Japan
Prior art keywords
shield
exhaust port
cryopump
panel
gas molecules
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16047583A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6053684A (ja
Inventor
Hiroyuki Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP16047583A priority Critical patent/JPS6053684A/ja
Publication of JPS6053684A publication Critical patent/JPS6053684A/ja
Publication of JPS6334316B2 publication Critical patent/JPS6334316B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP16047583A 1983-09-02 1983-09-02 クライオポンプ Granted JPS6053684A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16047583A JPS6053684A (ja) 1983-09-02 1983-09-02 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16047583A JPS6053684A (ja) 1983-09-02 1983-09-02 クライオポンプ

Publications (2)

Publication Number Publication Date
JPS6053684A JPS6053684A (ja) 1985-03-27
JPS6334316B2 true JPS6334316B2 (enrdf_load_stackoverflow) 1988-07-08

Family

ID=15715753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16047583A Granted JPS6053684A (ja) 1983-09-02 1983-09-02 クライオポンプ

Country Status (1)

Country Link
JP (1) JPS6053684A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6322610A (ja) * 1986-07-16 1988-01-30 株式会社　大畑窯業 タイル素地の模様付け方法
JPH074515B2 (ja) * 1987-09-16 1995-01-25 株式会社日立製作所 真空処理装置の運転方法
JPH01277687A (ja) * 1988-04-28 1989-11-08 Sumitomo Precision Prod Co Ltd クライオポンプ
JPH01294976A (ja) * 1988-05-19 1989-11-28 Sumitomo Precision Prod Co Ltd クライオポンプの操作方法
US5228299A (en) * 1992-04-16 1993-07-20 Helix Technology Corporation Cryopump water drain
KR102661608B1 (ko) * 2023-09-25 2024-05-02 크라이오에이치앤아이(주) 크라이오 펌프

Also Published As

Publication number Publication date
JPS6053684A (ja) 1985-03-27

Similar Documents

Publication Publication Date Title
EP0117523B2 (en) Reduced vacuum cryopump
JP5184995B2 (ja) クライオポンプ
US4546613A (en) Cryopump with rapid cooldown and increased pressure
JPS6334316B2 (enrdf_load_stackoverflow)
EP0038185A1 (en) Cryopumping apparatus
US5345787A (en) Miniature cryosorption vacuum pump
JP2001510523A (ja) 改良型シールド付きクライオポンプ
JPH0216377A (ja) クライオポンプ
JPH0192591A (ja) クライオポンプ
JP3961050B2 (ja) 真空排気装置
US5343709A (en) Cryopump
EP0126909B1 (en) Cryopump with rapid cooldown and increased pressure stability
JP5025492B2 (ja) 改善されたクライオポンプ
JPS62162779A (ja) クライオポンプの改良
JP2006029650A (ja) 恒温槽
JPH0658291A (ja) ターボ分子ポンプ用クライオトラップ
JP3604228B2 (ja) 真空排気装置
JPH11166477A (ja) クライオポンプ
JP4547076B2 (ja) クライオトラップ
JP2943489B2 (ja) 真空排気装置のコールドトラップ
JPH0447180A (ja) クライオポンプ
JPS5810935Y2 (ja) 空気調和機
JPH0451669B2 (enrdf_load_stackoverflow)
JP6053552B2 (ja) クライオポンプ及びクライオポンプ取付構造
JPH06200570A (ja) 住宅の構造材