JPS6334166U - - Google Patents

Info

Publication number
JPS6334166U
JPS6334166U JP12596186U JP12596186U JPS6334166U JP S6334166 U JPS6334166 U JP S6334166U JP 12596186 U JP12596186 U JP 12596186U JP 12596186 U JP12596186 U JP 12596186U JP S6334166 U JPS6334166 U JP S6334166U
Authority
JP
Japan
Prior art keywords
viewport
evaporation source
reflecting mirror
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12596186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12596186U priority Critical patent/JPS6334166U/ja
Publication of JPS6334166U publication Critical patent/JPS6334166U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12596186U 1986-08-18 1986-08-18 Pending JPS6334166U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12596186U JPS6334166U (enrdf_load_stackoverflow) 1986-08-18 1986-08-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12596186U JPS6334166U (enrdf_load_stackoverflow) 1986-08-18 1986-08-18

Publications (1)

Publication Number Publication Date
JPS6334166U true JPS6334166U (enrdf_load_stackoverflow) 1988-03-04

Family

ID=31019318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12596186U Pending JPS6334166U (enrdf_load_stackoverflow) 1986-08-18 1986-08-18

Country Status (1)

Country Link
JP (1) JPS6334166U (enrdf_load_stackoverflow)

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