JPS62110265U - - Google Patents

Info

Publication number
JPS62110265U
JPS62110265U JP20281985U JP20281985U JPS62110265U JP S62110265 U JPS62110265 U JP S62110265U JP 20281985 U JP20281985 U JP 20281985U JP 20281985 U JP20281985 U JP 20281985U JP S62110265 U JPS62110265 U JP S62110265U
Authority
JP
Japan
Prior art keywords
ion plating
plating apparatus
loading
unloading port
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20281985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20281985U priority Critical patent/JPS62110265U/ja
Publication of JPS62110265U publication Critical patent/JPS62110265U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP20281985U 1985-12-28 1985-12-28 Pending JPS62110265U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20281985U JPS62110265U (enrdf_load_stackoverflow) 1985-12-28 1985-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20281985U JPS62110265U (enrdf_load_stackoverflow) 1985-12-28 1985-12-28

Publications (1)

Publication Number Publication Date
JPS62110265U true JPS62110265U (enrdf_load_stackoverflow) 1987-07-14

Family

ID=31167559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20281985U Pending JPS62110265U (enrdf_load_stackoverflow) 1985-12-28 1985-12-28

Country Status (1)

Country Link
JP (1) JPS62110265U (enrdf_load_stackoverflow)

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