JPS6334163U - - Google Patents

Info

Publication number
JPS6334163U
JPS6334163U JP12648386U JP12648386U JPS6334163U JP S6334163 U JPS6334163 U JP S6334163U JP 12648386 U JP12648386 U JP 12648386U JP 12648386 U JP12648386 U JP 12648386U JP S6334163 U JPS6334163 U JP S6334163U
Authority
JP
Japan
Prior art keywords
planetary
annular frame
shaft
circular parts
metal film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12648386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0345947Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12648386U priority Critical patent/JPH0345947Y2/ja
Publication of JPS6334163U publication Critical patent/JPS6334163U/ja
Application granted granted Critical
Publication of JPH0345947Y2 publication Critical patent/JPH0345947Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12648386U 1986-08-21 1986-08-21 Expired JPH0345947Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12648386U JPH0345947Y2 (enrdf_load_stackoverflow) 1986-08-21 1986-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12648386U JPH0345947Y2 (enrdf_load_stackoverflow) 1986-08-21 1986-08-21

Publications (2)

Publication Number Publication Date
JPS6334163U true JPS6334163U (enrdf_load_stackoverflow) 1988-03-04
JPH0345947Y2 JPH0345947Y2 (enrdf_load_stackoverflow) 1991-09-27

Family

ID=31020324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12648386U Expired JPH0345947Y2 (enrdf_load_stackoverflow) 1986-08-21 1986-08-21

Country Status (1)

Country Link
JP (1) JPH0345947Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0345947Y2 (enrdf_load_stackoverflow) 1991-09-27

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