JPS6333560A - 薄膜蒸着装置 - Google Patents
薄膜蒸着装置Info
- Publication number
- JPS6333560A JPS6333560A JP17374986A JP17374986A JPS6333560A JP S6333560 A JPS6333560 A JP S6333560A JP 17374986 A JP17374986 A JP 17374986A JP 17374986 A JP17374986 A JP 17374986A JP S6333560 A JPS6333560 A JP S6333560A
- Authority
- JP
- Japan
- Prior art keywords
- bases
- clusters
- thin film
- crucible
- filaments
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17374986A JPS6333560A (ja) | 1986-07-25 | 1986-07-25 | 薄膜蒸着装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17374986A JPS6333560A (ja) | 1986-07-25 | 1986-07-25 | 薄膜蒸着装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6333560A true JPS6333560A (ja) | 1988-02-13 |
JPH0542506B2 JPH0542506B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-06-28 |
Family
ID=15966418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17374986A Granted JPS6333560A (ja) | 1986-07-25 | 1986-07-25 | 薄膜蒸着装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6333560A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1986
- 1986-07-25 JP JP17374986A patent/JPS6333560A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0542506B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-06-28 |
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