JPS6333275B2 - - Google Patents

Info

Publication number
JPS6333275B2
JPS6333275B2 JP56007951A JP795181A JPS6333275B2 JP S6333275 B2 JPS6333275 B2 JP S6333275B2 JP 56007951 A JP56007951 A JP 56007951A JP 795181 A JP795181 A JP 795181A JP S6333275 B2 JPS6333275 B2 JP S6333275B2
Authority
JP
Japan
Prior art keywords
wafer
microwave
temperature
support
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56007951A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57123679A (en
Inventor
Haruo Amada
Kyoshi Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP795181A priority Critical patent/JPS57123679A/ja
Publication of JPS57123679A publication Critical patent/JPS57123679A/ja
Publication of JPS6333275B2 publication Critical patent/JPS6333275B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of High-Frequency Heating Circuits (AREA)
  • Constitution Of High-Frequency Heating (AREA)
JP795181A 1981-01-23 1981-01-23 Heater Granted JPS57123679A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP795181A JPS57123679A (en) 1981-01-23 1981-01-23 Heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP795181A JPS57123679A (en) 1981-01-23 1981-01-23 Heater

Publications (2)

Publication Number Publication Date
JPS57123679A JPS57123679A (en) 1982-08-02
JPS6333275B2 true JPS6333275B2 (enrdf_load_stackoverflow) 1988-07-05

Family

ID=11679794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP795181A Granted JPS57123679A (en) 1981-01-23 1981-01-23 Heater

Country Status (1)

Country Link
JP (1) JPS57123679A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01225119A (ja) * 1988-03-03 1989-09-08 Nec Corp ホットプレート式ベーキング装置
FR2854022A1 (fr) * 2003-04-16 2004-10-22 Rimm Technologies Corp N V Dispositif a micro-ondes ou a radio-frequences comprenant trois generateurs decouples
JP2007228219A (ja) * 2006-02-23 2007-09-06 Idx Corp マイクロ波装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5217160Y2 (enrdf_load_stackoverflow) * 1972-08-21 1977-04-18
JPS5055951U (enrdf_load_stackoverflow) * 1973-09-20 1975-05-27
JPS5244922U (enrdf_load_stackoverflow) * 1975-09-26 1977-03-30
JPS5828500B2 (ja) * 1977-04-18 1983-06-16 株式会社日立ホームテック 高周波加熱装置

Also Published As

Publication number Publication date
JPS57123679A (en) 1982-08-02

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