JPS6332862B2 - - Google Patents

Info

Publication number
JPS6332862B2
JPS6332862B2 JP56031923A JP3192381A JPS6332862B2 JP S6332862 B2 JPS6332862 B2 JP S6332862B2 JP 56031923 A JP56031923 A JP 56031923A JP 3192381 A JP3192381 A JP 3192381A JP S6332862 B2 JPS6332862 B2 JP S6332862B2
Authority
JP
Japan
Prior art keywords
groove
target
ferromagnetic
annular
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56031923A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57149471A (en
Inventor
Kyuzo Nakamura
Hiroki Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP3192381A priority Critical patent/JPS57149471A/ja
Publication of JPS57149471A publication Critical patent/JPS57149471A/ja
Publication of JPS6332862B2 publication Critical patent/JPS6332862B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP3192381A 1981-03-07 1981-03-07 High-speed spattering device for ferromagnetic body Granted JPS57149471A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3192381A JPS57149471A (en) 1981-03-07 1981-03-07 High-speed spattering device for ferromagnetic body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3192381A JPS57149471A (en) 1981-03-07 1981-03-07 High-speed spattering device for ferromagnetic body

Publications (2)

Publication Number Publication Date
JPS57149471A JPS57149471A (en) 1982-09-16
JPS6332862B2 true JPS6332862B2 (index.php) 1988-07-01

Family

ID=12344486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3192381A Granted JPS57149471A (en) 1981-03-07 1981-03-07 High-speed spattering device for ferromagnetic body

Country Status (1)

Country Link
JP (1) JPS57149471A (index.php)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59122779A (ja) * 1982-08-31 1984-07-16 Ngk Spark Plug Co Ltd グロ−プラグの通電制御装置
DE19819933A1 (de) * 1998-05-05 1999-11-11 Leybold Systems Gmbh Target für eine Kathodenzerstäubungsvorrichtung zur Herstellung dünner Schichten

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118619A (en) * 1981-01-16 1982-07-23 Ulvac Corp High speed sputtering device for ferromagnetic material

Also Published As

Publication number Publication date
JPS57149471A (en) 1982-09-16

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