JPS6330570B2 - - Google Patents
Info
- Publication number
- JPS6330570B2 JPS6330570B2 JP53007277A JP727778A JPS6330570B2 JP S6330570 B2 JPS6330570 B2 JP S6330570B2 JP 53007277 A JP53007277 A JP 53007277A JP 727778 A JP727778 A JP 727778A JP S6330570 B2 JPS6330570 B2 JP S6330570B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- foreign matter
- reflected
- main surface
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 42
- 238000007689 inspection Methods 0.000 claims description 32
- 239000000758 substrate Substances 0.000 claims description 9
- 230000010287 polarization Effects 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 40
- 238000000034 method Methods 0.000 description 7
- 238000011179 visual inspection Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000013598 vector Substances 0.000 description 2
- 238000012369 In process control Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010965 in-process control Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP727778A JPS54101390A (en) | 1978-01-27 | 1978-01-27 | Foreign matter inspector |
US06/005,924 US4342515A (en) | 1978-01-27 | 1979-01-23 | Method of inspecting the surface of an object and apparatus therefor |
DE19792903072 DE2903072A1 (de) | 1978-01-27 | 1979-01-26 | Vorrichtung und verfahren zur oberflaechenpruefung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP727778A JPS54101390A (en) | 1978-01-27 | 1978-01-27 | Foreign matter inspector |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13715884A Division JPS60122360A (ja) | 1984-07-04 | 1984-07-04 | 光学検査装置 |
JP13715784A Division JPS60122359A (ja) | 1984-07-04 | 1984-07-04 | 光学検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54101390A JPS54101390A (en) | 1979-08-09 |
JPS6330570B2 true JPS6330570B2 (fr) | 1988-06-20 |
Family
ID=11661526
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP727778A Granted JPS54101390A (en) | 1978-01-27 | 1978-01-27 | Foreign matter inspector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54101390A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04130694U (ja) * | 1991-05-21 | 1992-11-30 | ワイケイケイアーキテクチユラルプロダクツ株式会社 | 上吊式引戸 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5686340A (en) * | 1979-12-17 | 1981-07-14 | Hitachi Ltd | Automatic detector for foreign matter |
JPS5780546A (en) * | 1980-11-07 | 1982-05-20 | Nippon Kogaku Kk <Nikon> | Detecting device for foreign substance |
JPS58110041A (ja) * | 1981-12-23 | 1983-06-30 | Fujitsu Ltd | パタ−ン検査方法 |
US4469442A (en) * | 1982-01-11 | 1984-09-04 | Japan Crown Cork Co., Ltd. | Detecting irregularities in a coating on a substrate |
JPS6015939A (ja) * | 1983-07-08 | 1985-01-26 | Hitachi Ltd | 異物検査装置 |
JPS60251681A (ja) * | 1984-05-29 | 1985-12-12 | Hitachi Electronics Eng Co Ltd | 表面弾性波フイルタ用ウエハの検査装置 |
JPS6211140A (ja) * | 1985-06-28 | 1987-01-20 | Hitachi Electronics Eng Co Ltd | 異物検査装置 |
JPS6211148A (ja) * | 1985-06-28 | 1987-01-20 | Hitachi Electronics Eng Co Ltd | 異物検査装置 |
JPS6275336A (ja) * | 1985-09-30 | 1987-04-07 | Hitachi Electronics Eng Co Ltd | 異物検査装置 |
US5410400A (en) * | 1991-06-26 | 1995-04-25 | Hitachi, Ltd. | Foreign particle inspection apparatus |
JP3314440B2 (ja) * | 1993-02-26 | 2002-08-12 | 株式会社日立製作所 | 欠陥検査装置およびその方法 |
JPH07201946A (ja) | 1993-12-28 | 1995-08-04 | Hitachi Ltd | 半導体装置等の製造方法及びその装置並びに検査方法及びその装置 |
US6546308B2 (en) | 1993-12-28 | 2003-04-08 | Hitachi, Ltd, | Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices |
US6366690B1 (en) | 1998-07-07 | 2002-04-02 | Applied Materials, Inc. | Pixel based machine for patterned wafers |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51112183A (en) * | 1974-08-12 | 1976-10-04 | Mitsubishi Electric Corp | Diffraction pattern detector |
JPS52138183A (en) * | 1976-05-14 | 1977-11-18 | Toshiba Corp | Inspecting apparatus for flaw |
-
1978
- 1978-01-27 JP JP727778A patent/JPS54101390A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51112183A (en) * | 1974-08-12 | 1976-10-04 | Mitsubishi Electric Corp | Diffraction pattern detector |
JPS52138183A (en) * | 1976-05-14 | 1977-11-18 | Toshiba Corp | Inspecting apparatus for flaw |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04130694U (ja) * | 1991-05-21 | 1992-11-30 | ワイケイケイアーキテクチユラルプロダクツ株式会社 | 上吊式引戸 |
Also Published As
Publication number | Publication date |
---|---|
JPS54101390A (en) | 1979-08-09 |
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