JPS6329923A - ウエハカセツト収納箱 - Google Patents

ウエハカセツト収納箱

Info

Publication number
JPS6329923A
JPS6329923A JP61174231A JP17423186A JPS6329923A JP S6329923 A JPS6329923 A JP S6329923A JP 61174231 A JP61174231 A JP 61174231A JP 17423186 A JP17423186 A JP 17423186A JP S6329923 A JPS6329923 A JP S6329923A
Authority
JP
Japan
Prior art keywords
storage box
card
wafer cassette
information
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61174231A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0565057B2 (enExample
Inventor
Akira Harada
明 原田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP61174231A priority Critical patent/JPS6329923A/ja
Publication of JPS6329923A publication Critical patent/JPS6329923A/ja
Publication of JPH0565057B2 publication Critical patent/JPH0565057B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP61174231A 1986-07-24 1986-07-24 ウエハカセツト収納箱 Granted JPS6329923A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61174231A JPS6329923A (ja) 1986-07-24 1986-07-24 ウエハカセツト収納箱

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61174231A JPS6329923A (ja) 1986-07-24 1986-07-24 ウエハカセツト収納箱

Publications (2)

Publication Number Publication Date
JPS6329923A true JPS6329923A (ja) 1988-02-08
JPH0565057B2 JPH0565057B2 (enExample) 1993-09-16

Family

ID=15975013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61174231A Granted JPS6329923A (ja) 1986-07-24 1986-07-24 ウエハカセツト収納箱

Country Status (1)

Country Link
JP (1) JPS6329923A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03173454A (ja) * 1989-12-02 1991-07-26 Dainichi Shoji Kk 基板収納用容器及びその容器の成形法
JPH06183522A (ja) * 1992-12-17 1994-07-05 Mitsubishi Electric Corp 半導体ウエハ搬送装置
US5536128A (en) * 1988-10-21 1996-07-16 Hitachi, Ltd. Method and apparatus for carrying a variety of products
US5605231A (en) * 1994-07-18 1997-02-25 The Green Partnership Inc. Food delivery container
JP2000021966A (ja) * 1998-07-07 2000-01-21 Shin Etsu Polymer Co Ltd 精密基板収納容器
SG92640A1 (en) * 1999-06-07 2002-11-19 E Pak Resources S Pte Ltd Stud and rider for use on matrix trays
JP2012023240A (ja) * 2010-07-15 2012-02-02 Shin Etsu Polymer Co Ltd 基板収納容器

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5536128A (en) * 1988-10-21 1996-07-16 Hitachi, Ltd. Method and apparatus for carrying a variety of products
JPH03173454A (ja) * 1989-12-02 1991-07-26 Dainichi Shoji Kk 基板収納用容器及びその容器の成形法
JPH06183522A (ja) * 1992-12-17 1994-07-05 Mitsubishi Electric Corp 半導体ウエハ搬送装置
US5605231A (en) * 1994-07-18 1997-02-25 The Green Partnership Inc. Food delivery container
JP2000021966A (ja) * 1998-07-07 2000-01-21 Shin Etsu Polymer Co Ltd 精密基板収納容器
SG92640A1 (en) * 1999-06-07 2002-11-19 E Pak Resources S Pte Ltd Stud and rider for use on matrix trays
JP2012023240A (ja) * 2010-07-15 2012-02-02 Shin Etsu Polymer Co Ltd 基板収納容器

Also Published As

Publication number Publication date
JPH0565057B2 (enExample) 1993-09-16

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