JPS6329744Y2 - - Google Patents

Info

Publication number
JPS6329744Y2
JPS6329744Y2 JP1983001593U JP159383U JPS6329744Y2 JP S6329744 Y2 JPS6329744 Y2 JP S6329744Y2 JP 1983001593 U JP1983001593 U JP 1983001593U JP 159383 U JP159383 U JP 159383U JP S6329744 Y2 JPS6329744 Y2 JP S6329744Y2
Authority
JP
Japan
Prior art keywords
gas
nozzle
susceptor
vapor phase
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983001593U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59109776U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP159383U priority Critical patent/JPS59109776U/ja
Publication of JPS59109776U publication Critical patent/JPS59109776U/ja
Application granted granted Critical
Publication of JPS6329744Y2 publication Critical patent/JPS6329744Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP159383U 1983-01-10 1983-01-10 気相成長装置 Granted JPS59109776U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP159383U JPS59109776U (ja) 1983-01-10 1983-01-10 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP159383U JPS59109776U (ja) 1983-01-10 1983-01-10 気相成長装置

Publications (2)

Publication Number Publication Date
JPS59109776U JPS59109776U (ja) 1984-07-24
JPS6329744Y2 true JPS6329744Y2 (cs) 1988-08-09

Family

ID=30133310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP159383U Granted JPS59109776U (ja) 1983-01-10 1983-01-10 気相成長装置

Country Status (1)

Country Link
JP (1) JPS59109776U (cs)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940905B2 (ja) * 1976-12-27 1984-10-03 松下電器産業株式会社 気相成長装置
JPS5420972A (en) * 1977-07-18 1979-02-16 Nec Corp Vapor phase growing device
JPS5442747U (cs) * 1977-08-30 1979-03-23

Also Published As

Publication number Publication date
JPS59109776U (ja) 1984-07-24

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