JPS6329230Y2 - - Google Patents
Info
- Publication number
- JPS6329230Y2 JPS6329230Y2 JP7967482U JP7967482U JPS6329230Y2 JP S6329230 Y2 JPS6329230 Y2 JP S6329230Y2 JP 7967482 U JP7967482 U JP 7967482U JP 7967482 U JP7967482 U JP 7967482U JP S6329230 Y2 JPS6329230 Y2 JP S6329230Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- vapor deposition
- magnetic field
- rotating magnetic
- generating means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007740 vapor deposition Methods 0.000 claims description 27
- 239000000126 substance Substances 0.000 claims description 15
- 239000000523 sample Substances 0.000 description 39
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 24
- 239000000463 material Substances 0.000 description 13
- 229910052786 argon Inorganic materials 0.000 description 12
- 150000002500 ions Chemical class 0.000 description 10
- 239000007789 gas Substances 0.000 description 6
- -1 argon cations Chemical class 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 150000001485 argon Chemical class 0.000 description 1
- XJVBHCCEUWWHMI-UHFFFAOYSA-N argon(.1+) Chemical compound [Ar+] XJVBHCCEUWWHMI-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000005405 multipole Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7967482U JPS58182140U (ja) | 1982-05-29 | 1982-05-29 | 蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7967482U JPS58182140U (ja) | 1982-05-29 | 1982-05-29 | 蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58182140U JPS58182140U (ja) | 1983-12-05 |
| JPS6329230Y2 true JPS6329230Y2 (nl) | 1988-08-05 |
Family
ID=30088852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7967482U Granted JPS58182140U (ja) | 1982-05-29 | 1982-05-29 | 蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58182140U (nl) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009216425A (ja) * | 2008-03-07 | 2009-09-24 | Mitsui Chemical Analysis & Consulting Service Inc | 異物分析用試料および異物の分析方法 |
-
1982
- 1982-05-29 JP JP7967482U patent/JPS58182140U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58182140U (ja) | 1983-12-05 |
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