JPS6328765B2 - - Google Patents

Info

Publication number
JPS6328765B2
JPS6328765B2 JP60046595A JP4659585A JPS6328765B2 JP S6328765 B2 JPS6328765 B2 JP S6328765B2 JP 60046595 A JP60046595 A JP 60046595A JP 4659585 A JP4659585 A JP 4659585A JP S6328765 B2 JPS6328765 B2 JP S6328765B2
Authority
JP
Japan
Prior art keywords
wafer
dicing
wafers
loader
transferred
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60046595A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60214911A (ja
Inventor
Tsutomu Mimata
Akira Kabashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60046595A priority Critical patent/JPS60214911A/ja
Publication of JPS60214911A publication Critical patent/JPS60214911A/ja
Publication of JPS6328765B2 publication Critical patent/JPS6328765B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Dicing (AREA)
JP60046595A 1985-03-11 1985-03-11 ダイシング装置 Granted JPS60214911A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60046595A JPS60214911A (ja) 1985-03-11 1985-03-11 ダイシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60046595A JPS60214911A (ja) 1985-03-11 1985-03-11 ダイシング装置

Publications (2)

Publication Number Publication Date
JPS60214911A JPS60214911A (ja) 1985-10-28
JPS6328765B2 true JPS6328765B2 (enrdf_load_stackoverflow) 1988-06-09

Family

ID=12751649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60046595A Granted JPS60214911A (ja) 1985-03-11 1985-03-11 ダイシング装置

Country Status (1)

Country Link
JP (1) JPS60214911A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0647220B2 (ja) * 1987-05-18 1994-06-22 株式会社東京精密 ダイシング装置におけるワ−ク搬送方法及び装置
JPH0523291Y2 (enrdf_load_stackoverflow) * 1987-12-11 1993-06-15
JP3367065B2 (ja) * 1996-08-13 2003-01-14 株式会社東京精密 ダイシング装置におけるワーク搬送装置
JP3485816B2 (ja) 1998-12-09 2004-01-13 太陽誘電株式会社 ダイシング装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3865254A (en) * 1973-05-21 1975-02-11 Kasker Instr Inc Prealignment system for an optical alignment and exposure instrument

Also Published As

Publication number Publication date
JPS60214911A (ja) 1985-10-28

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