JPS60214911A - ダイシング装置 - Google Patents

ダイシング装置

Info

Publication number
JPS60214911A
JPS60214911A JP60046595A JP4659585A JPS60214911A JP S60214911 A JPS60214911 A JP S60214911A JP 60046595 A JP60046595 A JP 60046595A JP 4659585 A JP4659585 A JP 4659585A JP S60214911 A JPS60214911 A JP S60214911A
Authority
JP
Japan
Prior art keywords
wafer
dicing
wafers
chuck
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60046595A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6328765B2 (enrdf_load_stackoverflow
Inventor
巳又　力
樺島　章
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60046595A priority Critical patent/JPS60214911A/ja
Publication of JPS60214911A publication Critical patent/JPS60214911A/ja
Publication of JPS6328765B2 publication Critical patent/JPS6328765B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Dicing (AREA)
JP60046595A 1985-03-11 1985-03-11 ダイシング装置 Granted JPS60214911A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60046595A JPS60214911A (ja) 1985-03-11 1985-03-11 ダイシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60046595A JPS60214911A (ja) 1985-03-11 1985-03-11 ダイシング装置

Publications (2)

Publication Number Publication Date
JPS60214911A true JPS60214911A (ja) 1985-10-28
JPS6328765B2 JPS6328765B2 (enrdf_load_stackoverflow) 1988-06-09

Family

ID=12751649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60046595A Granted JPS60214911A (ja) 1985-03-11 1985-03-11 ダイシング装置

Country Status (1)

Country Link
JP (1) JPS60214911A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63288642A (ja) * 1987-05-18 1988-11-25 Tokyo Seimitsu Co Ltd ダイシング装置におけるワ−ク搬送方法及び装置
JPH0191509U (enrdf_load_stackoverflow) * 1987-12-11 1989-06-15
US5885051A (en) * 1996-08-13 1999-03-23 Tokyo Seimitsu Co., Ltd. Workpiece transfer equipment in dicing machine
US6358115B1 (en) 1998-12-09 2002-03-19 Taiyo Yuden Co. Ltd. Dicing apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5021682A (enrdf_load_stackoverflow) * 1973-05-21 1975-03-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5021682A (enrdf_load_stackoverflow) * 1973-05-21 1975-03-07

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63288642A (ja) * 1987-05-18 1988-11-25 Tokyo Seimitsu Co Ltd ダイシング装置におけるワ−ク搬送方法及び装置
JPH0191509U (enrdf_load_stackoverflow) * 1987-12-11 1989-06-15
US5885051A (en) * 1996-08-13 1999-03-23 Tokyo Seimitsu Co., Ltd. Workpiece transfer equipment in dicing machine
US6358115B1 (en) 1998-12-09 2002-03-19 Taiyo Yuden Co. Ltd. Dicing apparatus

Also Published As

Publication number Publication date
JPS6328765B2 (enrdf_load_stackoverflow) 1988-06-09

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