JPS6328260B2 - - Google Patents

Info

Publication number
JPS6328260B2
JPS6328260B2 JP16024281A JP16024281A JPS6328260B2 JP S6328260 B2 JPS6328260 B2 JP S6328260B2 JP 16024281 A JP16024281 A JP 16024281A JP 16024281 A JP16024281 A JP 16024281A JP S6328260 B2 JPS6328260 B2 JP S6328260B2
Authority
JP
Japan
Prior art keywords
strain
diaphragm
pressure
generating
rigid body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16024281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5862534A (ja
Inventor
Tsutomu Okayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP16024281A priority Critical patent/JPS5862534A/ja
Publication of JPS5862534A publication Critical patent/JPS5862534A/ja
Publication of JPS6328260B2 publication Critical patent/JPS6328260B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
JP16024281A 1981-10-09 1981-10-09 半導体測定ダイアフラム Granted JPS5862534A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16024281A JPS5862534A (ja) 1981-10-09 1981-10-09 半導体測定ダイアフラム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16024281A JPS5862534A (ja) 1981-10-09 1981-10-09 半導体測定ダイアフラム

Publications (2)

Publication Number Publication Date
JPS5862534A JPS5862534A (ja) 1983-04-14
JPS6328260B2 true JPS6328260B2 (en, 2012) 1988-06-07

Family

ID=15710770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16024281A Granted JPS5862534A (ja) 1981-10-09 1981-10-09 半導体測定ダイアフラム

Country Status (1)

Country Link
JP (1) JPS5862534A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS613437U (ja) * 1984-06-12 1986-01-10 株式会社 長野計器製作所 圧力センサ
JPS613436U (ja) * 1984-06-12 1986-01-10 株式会社 長野計器製作所 圧力センサ

Also Published As

Publication number Publication date
JPS5862534A (ja) 1983-04-14

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