JPS6328027A - Electrode foil for electrolytic capacitor and manufacture of the same - Google Patents

Electrode foil for electrolytic capacitor and manufacture of the same

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Publication number
JPS6328027A
JPS6328027A JP17205386A JP17205386A JPS6328027A JP S6328027 A JPS6328027 A JP S6328027A JP 17205386 A JP17205386 A JP 17205386A JP 17205386 A JP17205386 A JP 17205386A JP S6328027 A JPS6328027 A JP S6328027A
Authority
JP
Japan
Prior art keywords
etching
foil
electrode foil
valve metal
bumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17205386A
Other languages
Japanese (ja)
Inventor
老田 昌弘
佐藤 富
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP17205386A priority Critical patent/JPS6328027A/en
Publication of JPS6328027A publication Critical patent/JPS6328027A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、電解コンデンサ用電極箔とその製造方法に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an electrode foil for electrolytic capacitors and a method for manufacturing the same.

従来の技術 電解コンデンサ用の電極箔は、コンデンサの小型化およ
び大容量化をねらいとして、従来からその表面をできる
限り巧妙にエツチングして表面積を増加する方法が行わ
れてきた。たとえば、特公昭57−17080号公報に
は、電極箔に陽極酸化を施してからエツチングを行う方
法、特公昭60−38861号公報には、多段階エツチ
ング法で電極箔の拡面化を行う方法、また、特開昭55
−11364号公報にはトリポリりん酸塩中でエツチン
グする方法が知られている。さらには、特開昭61−5
187号公報および同じく特開昭61−5188号公報
には、アルミニウム箔の表面に、電解エツチング液に対
して耐性を有し、かつ、エツチング核を形成すべき多数
の微細孔の形成された耐性被膜が一体的に付着されてな
る電解コンデンサ用アルミニウム電極材、また微細孔の
形成にあたっては、アルミニウム箔の表面に、金属若く
は非金属の微粒子を混入した被覆材を塗布した後、微粒
子を除去することにより、多数の微細孔の形成された耐
性被膜を形成できることが開示されている。
BACKGROUND OF THE INVENTION Conventional techniques have conventionally been used to increase the surface area of electrode foils for electrolytic capacitors by etching their surfaces as skillfully as possible, with the aim of making capacitors smaller and larger in capacity. For example, Japanese Patent Publication No. 57-17080 discloses a method in which electrode foil is anodized and then etched, and Japanese Patent Publication No. 60-38861 discloses a method in which the surface of electrode foil is enlarged by a multi-step etching method. , also published in Japanese Unexamined Patent Publication No. 55
No. 11364 discloses a method of etching in tripolyphosphate. Furthermore, JP-A-61-5
No. 187 and also Japanese Unexamined Patent Application Publication No. 61-5188 disclose a method in which a large number of fine pores are formed on the surface of an aluminum foil that are resistant to an electrolytic etching solution and should form etching nuclei. Aluminum electrode material for electrolytic capacitors has a coating integrally attached to it, and when forming micropores, a coating material mixed with metal or non-metallic particles is applied to the surface of the aluminum foil, and then the particles are removed. It is disclosed that by doing so, it is possible to form a resistant coating in which a large number of micropores are formed.

発明が解決しようとする問題点 従来の技術のうち、はじめの3つの発明が開示している
如き構成では、電極箔の表面は、エツチングに゛さいし
ては、つねにエツチング液に一様に接触しておりその結
果、どうしても第2図に示すような過剰工・ノチング6
を実質的に防ぎ得るものではなく、粗面化の程度はわる
いものとなる。また、あとの2つの発明による構成では
、コンデンサ電極材にフォトレジストの如きエツチング
液に対して非溶性、耐食性の被膜をアルミニウム上に付
着させると、エツチング後にレジスト膜を除去する工程
が必須のものとなり、そのさい、除去液に浸漬すると、
すでに微細にエツチングを施されたアルミニウム電極材
の内部にレジストの成分が入り込んでくるために、その
除去に手間がかがり、その上、十分な除去はきわめてむ
つかしく、その結果コンデンサ特性の低下を招く原因と
もなる。
Problems to be Solved by the Invention Among the conventional techniques, in the structure disclosed in the first three inventions, the surface of the electrode foil is always in uniform contact with the etching solution during etching. As a result, excessive machining and notching as shown in Figure 2 is inevitable.
However, the degree of surface roughening is poor. In addition, in the configurations according to the latter two inventions, if a corrosion-resistant film such as a photoresist that is insoluble in an etching solution is attached to the capacitor electrode material on the aluminum, a step of removing the resist film after etching is essential. At that time, when immersed in the removal solution,
Because resist components enter the inside of the aluminum electrode material, which has already been finely etched, it takes time and effort to remove it, and furthermore, it is extremely difficult to remove it sufficiently, resulting in a decline in capacitor characteristics. It also becomes.

本発明は、上記の問題点に鑑みて、電極箔の過剰エツチ
ングを防止し、かつ、コンデンサ材料である弁作用金属
上にまんべんなく均一にエッチビットを形成させること
のできる電極コンデンサ用電極箔とその製造方法を提供
する。
In view of the above problems, the present invention provides an electrode foil for an electrode capacitor that can prevent excessive etching of the electrode foil and form etched bits evenly and uniformly on the valve metal that is the capacitor material. A manufacturing method is provided.

問題点を解決するための手段 上記のような問題点を解決するために、本発明は、弁作
用を有する金属の表面に多数の微細孔を有する弁作用金
属自体の酸化物を設けたものであり、弁作用金属の表面
に、樹脂ハンプを形成し、金属表面を酸化処理したのち
に、バンプを除去するというものである。
Means for Solving the Problems In order to solve the above-mentioned problems, the present invention provides an oxide of the valve metal itself having a large number of micropores on the surface of the valve metal. This involves forming resin bumps on the surface of the valve metal, oxidizing the metal surface, and then removing the bumps.

作用 本発明は、上記の構成によって、電極箔のエツチングを
施す前に、エツチング部の金属を露出し、残りの部分は
、金属酸化物で被覆されているので、電極コンデンサ作
成のためのエツチングにさいして、金属部が酸化物部に
くらべてきわめてエツチングされやす(、過剰エツチン
グも防止され、表面積の大きい所望のエツチングが行わ
れることになる。
According to the above-described structure, the metal in the etched portion is exposed before etching the electrode foil, and the remaining portion is covered with metal oxide. In this case, the metal part is much more easily etched than the oxide part (excessive etching is also prevented, and the desired etching with a large surface area is performed).

実施例 以下に、本発明の構成を第1図にもとづいてわかりやす
く説明する。弁作用を有する金属としては、アルミニウ
ムをはじめタンタル、チタン等の電解コンデンサ用とし
て周知のものが用いられる。
EXAMPLES Below, the configuration of the present invention will be explained in an easy-to-understand manner based on FIG. As the metal having a valve action, metals well known for use in electrolytic capacitors such as aluminum, tantalum, and titanium are used.

これらの弁作用金属Fi 1にバンプ2を形成する。Bumps 2 are formed on these valve metals Fi1.

バンプ2は、樹脂によるとっ起がもっとも適しており、
具体的には、スチレン、アクリル、塩化ビニル、酢酸セ
ルロース、ポリカーボネイト、ポリエチレン等の熱可塑
性樹脂の粒子を含有する懸濁液に弁作用金属1を浸漬し
て、乾燥後加熱して、前記粒子を軟化することによって
、弁作用金属1に付着させる。また、金属箔に樹脂バン
プを形成するべつの方法として電着による塗装あるいは
、樹脂の粒子が浮遊している雰囲気中に加熱した弁作用
金属箔を導入することによっても可能である。
Bump 2 is most suitable for raising with resin.
Specifically, the valve metal 1 is immersed in a suspension containing particles of thermoplastic resin such as styrene, acrylic, vinyl chloride, cellulose acetate, polycarbonate, polyethylene, etc., and heated after drying to dissolve the particles. It is made to adhere to the valve metal 1 by softening. Another method for forming resin bumps on metal foil is by electrodeposition coating or by introducing a heated valve metal foil into an atmosphere in which resin particles are suspended.

樹脂粒子の粒径は、エツチングのビット径に合せて、所
望の大きさを選択することができるが、電極コンデンサ
のためのエッチビットの形成であることを考えれば、あ
まり大きな粒子は得策ではなく、エッチビットと同程度
の粒径の0.1〜10ミクロンが適当である。また、ビ
ットの数は、たとえば懸濁液中の粒子数および、塗布厚
を制御することによって容易に行うことができる。この
ような比較的に粒径の小さな樹脂粒子は、浮化あるいは
懸濁重合によって合成したものや、大きい粒子を機械的
に粉砕して微粒化したものも使用することができる。こ
うしてバンプ2を形成した弁作用金属箔1は、陽極酸化
あるいは、各種の酸化剤を用いて、バンプ形成のないも
とのままで露出している金属表面を酸化することによっ
て、酸化皮膜3を形成する。電極酸化は、カルボン酸等
の有機酸、はう酸やりん酸等あるいはこれらの塩等の比
較的に導電性のよい溶液で通常の陽極酸化の方法で実施
できる。また、化学的に酸化する場合は、硝酸や硝酸塩
、過酸化水素等の酸化剤を用いてもよいし、たんに熱溶
液中に浸漬することによっても可能である。このように
、樹脂のバンプ2と酸化皮膜3を表面に付着した弁作用
金属箔1を溶剤に浸漬して、バンプ2を除去する。
The particle size of the resin particles can be selected as desired according to the etching bit diameter, but considering that the purpose is to form an etched bit for an electrode capacitor, it is not a good idea to use particles that are too large. , a particle size of 0.1 to 10 microns, which is about the same as that of an etch bit, is suitable. Further, the number of bits can be easily adjusted by controlling, for example, the number of particles in the suspension and the coating thickness. Such resin particles having a relatively small particle size may be synthesized by flotation or suspension polymerization, or may be obtained by mechanically crushing large particles into fine particles. The valve metal foil 1 on which the bumps 2 have been formed in this way has an oxide film 3 formed thereon by anodizing or using various oxidizing agents to oxidize the exposed metal surface with no bumps formed thereon. Form. Electrode oxidation can be carried out by a conventional anodic oxidation method using a relatively conductive solution such as an organic acid such as carboxylic acid, halonic acid or phosphoric acid, or a salt thereof. In the case of chemical oxidation, oxidizing agents such as nitric acid, nitrates, hydrogen peroxide, etc. may be used, or simply immersion in a hot solution may be used. The valve metal foil 1 having the resin bumps 2 and the oxide film 3 adhered to its surface in this way is immersed in a solvent to remove the bumps 2.

バンプ2を除去したときのようすは第1図の4で示す。The state when the bump 2 is removed is shown at 4 in FIG.

上記の手順によって、バンプ2で被覆されていた部分の
金属を露出させると、選択的に微細孔を有する弁作用金
属の酸化物を表面2こ生成させた電極コンデンサ電極用
金属箔が得られる。しかるのちに、これをエツチング液
に浸漬し、所望のエッチピット5を金属部に形成する。
When the metal in the portion covered with the bumps 2 is exposed by the above procedure, a metal foil for an electrode capacitor electrode is obtained in which a valve metal oxide selectively having micropores is formed on the surface. Thereafter, this is immersed in an etching solution to form desired etch pits 5 in the metal part.

エツチングについては、既知の方法は、いずれも実施可
能であるが、その代表的なものは、塩素イオンを含をす
る水溶液に金属箔を浸漬し、通電しながら行う方法であ
る。
Etching can be performed using any known method, but a typical method is to immerse the metal foil in an aqueous solution containing chlorine ions and conduct the etching while applying electricity.

つぎに、本発明の電極箔とこれを用いてコンデンサを作
成したときの特性を実施例1および2に示す。
Next, Examples 1 and 2 show the electrode foil of the present invention and the characteristics of a capacitor made using the electrode foil.

実施例1 厚さ100ミクロン、純度99.99%のアルミニウム
箔を平均粒径0.2ミクロンのP M M A粒子を重
量百分率で0.8%含有する水溶液に浸漬し、5ミクロ
ン厚にアルミ箔に均一に塗布する。60℃で15分間加
熱して乾燥し、140〜170°Cで5分間加熱するこ
とにより、P M M Aのバンプをアルミニウム電極
箔にまんべんなく形成する。つぎに、露出しているアル
ミニウム部は、7%はう酸水溶液中で55Vで化成して
酸化皮膜を形成する。これをよく水洗して乾燥してから
メチルエチルケトン中に浸漬し、PMMAのバンプを溶
解して除去する。
Example 1 An aluminum foil with a thickness of 100 microns and a purity of 99.99% was immersed in an aqueous solution containing 0.8% by weight of PMMA particles with an average particle size of 0.2 microns. Apply evenly to the foil. By heating and drying at 60° C. for 15 minutes and heating at 140 to 170° C. for 5 minutes, PMMA bumps are evenly formed on the aluminum electrode foil. Next, the exposed aluminum portion is chemically converted in a 7% aqueous solution of boric acid at 55 V to form an oxide film. This is thoroughly washed with water, dried, and then immersed in methyl ethyl ketone to dissolve and remove the PMMA bumps.

つぎに、5%塩酸と0.03%蓚酸からなる水溶液に浸
漬し、液温80℃、電流密度3.5mA/antで2分
間エツチングした。しかるのちに、このアルミニウム箔
を10%はう酸水溶液中で380■で化成したところ、
得られた電極箔の静電容量は0.88μF / cut
であった。比較例として、樹脂バンプを形成しない場合
のアルミニウム電極箔の容量は、0.73μF/cot
であったので約20%の容量増加が本発明のアルミニウ
ム電極箔で達成された。
Next, it was immersed in an aqueous solution consisting of 5% hydrochloric acid and 0.03% oxalic acid, and etched for 2 minutes at a liquid temperature of 80° C. and a current density of 3.5 mA/ant. Afterwards, when this aluminum foil was chemically converted in a 10% aqueous oxalic acid solution at 380 μm,
The capacitance of the obtained electrode foil was 0.88μF/cut
Met. As a comparative example, the capacitance of aluminum electrode foil when no resin bumps are formed is 0.73 μF/cot.
Therefore, an increase in capacity of about 20% was achieved with the aluminum electrode foil of the present invention.

実施例2 平均粒径0.45ミクロンのポリスチレン粒子を懸濁し
た状態で含有し、その濃度が5%の水溶液を用意し、こ
れに厚さ104ミクロン、純度99.99%のアルミニ
ウム箔を浸漬し、約10ミクロンの厚さに懸濁液をアル
ミニウム箔に均一に塗布した。70℃で10分間乾燥後
、120〜150℃で7分間熱処理を行って、ポリスチ
レンの粒子をアルミニウム上に融着させることによって
、アルミニウム上にまんべんなく樹脂バンプを形成する
。これを5%りん酸水溶液中で75Vで化成し、バンプ
の形成されていない金属アルミニウムの露出部に酸化皮
膜を形成し、水洗、乾燥してからトルエン溶液で処理す
ることによって、ポリスチレンのバンプを除去する。
Example 2 An aqueous solution containing suspended polystyrene particles with an average particle size of 0.45 microns and a concentration of 5% was prepared, and an aluminum foil with a thickness of 104 microns and a purity of 99.99% was immersed in this solution. The suspension was then uniformly applied to aluminum foil to a thickness of about 10 microns. After drying at 70° C. for 10 minutes, heat treatment is performed at 120 to 150° C. for 7 minutes to fuse the polystyrene particles onto the aluminum, thereby forming resin bumps evenly on the aluminum. This is chemically converted at 75V in a 5% phosphoric acid aqueous solution to form an oxide film on the exposed parts of the metal aluminum where no bumps are formed, washed with water, dried, and then treated with a toluene solution to form polystyrene bumps. Remove.

つぎに、5%塩酸、および、0.03%蓚酸水溶液中で
液温85℃、電流密度3.0mA/cnlで2分間エツ
チングした。しかるのちに、アルミ電極箔を10%はう
酸水溶液に浸漬し、380■で化成してから、静電容量
を測定したところ、0.82μF/calの値を得た。
Next, etching was carried out for 2 minutes in a 5% hydrochloric acid and 0.03% oxalic acid aqueous solution at a liquid temperature of 85° C. and a current density of 3.0 mA/cnl. Thereafter, the aluminum electrode foil was immersed in a 10% aqueous oxalic acid solution and chemically converted at 380 μm, and the capacitance was measured, and a value of 0.82 μF/cal was obtained.

比較例として、ポリスチンの樹脂バンプをアルミニウム
上に形成することなしにエツチングし、ひきつづいて化
成処理して得られた電極箔の静電容量は、0.69μF
/dであった。上記の結果からあきらかなように、本発
明の樹脂ハンプ形成電極を用いることにより17%の容
量増が認められた。
As a comparative example, the electrostatic capacitance of an electrode foil obtained by etching polystine resin bumps on aluminum without forming them and subsequent chemical conversion treatment was 0.69 μF.
/d. As is clear from the above results, a 17% increase in capacity was observed by using the resin hump-forming electrode of the present invention.

発明の効果 以上のように、本発明は、弁作用金属の表面に多数の微
小バンプを形成し、しかるのちに、前記表面を酸化し、
露出している前記弁作用金属の表面に、前記弁作用金属
の酸化皮膜を形成し、そののちに、前記バンプを除去し
て、エツチング処理を施すことによって、過剰エツチン
グを防ぎ、均一にまんべんなくエツチングすることが可
能であり、その結果、電極箔の粗面化が従来より非常に
大きくなることから、電解コンデンサの小型化ないしは
大容量化に大いに貢献できるものとなる。
Effects of the Invention As described above, the present invention forms a large number of micro bumps on the surface of a valve metal, then oxidizes the surface,
An oxide film of the valve metal is formed on the exposed surface of the valve metal, and then the bumps are removed and an etching process is performed to prevent excessive etching and ensure uniform and even etching. As a result, the surface roughness of the electrode foil becomes much greater than in the past, which greatly contributes to downsizing and increasing the capacity of electrolytic capacitors.

また、ピット径やピント数を樹脂ハンプの粒径を選択す
ることによって制御することもある程度可能であり、品
質の安定化に好都合となる。また二本発明は、エツチン
グ液に非溶性、耐食性のレジスト材料を使用しないので
これの除去も不要で、かつ、この成分の電極材に残肖す
ることによるコンデンサ特性の低下をきたすこともない
。さらに、本発明は、電解コンデンサ用の弁作用金属以
外の一般の金属に微細なスポット状のエツチングを施す
さいにも適用が可能である。
Furthermore, it is possible to some extent to control the pit diameter and the number of focuses by selecting the particle diameter of the resin hump, which is advantageous for stabilizing quality. Furthermore, since the present invention does not use an insoluble, corrosion-resistant resist material in the etching solution, it is not necessary to remove this material, and the capacitor characteristics will not be deteriorated due to the presence of this component on the electrode material. Further, the present invention can be applied to fine spot etching on general metals other than valve metals for electrolytic capacitors.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明の実施例における電解コンデンサ用電
極滴の断面図、第2図は従来の電解コンデンサ用電極箔
の断面図である。 1・・・・・・弁作用金属箔、2・・・・・・バンプ、
3・・・・・・酸化皮膜、5・・・・・・エソチピ7ト
、6・・・・・・過剰エツチング。 代理人の氏名 弁理士 中尾敏男 はか1名菓 1 図
               /−一一斗作用廷箔第
2図
FIG. 1 is a sectional view of an electrode droplet for an electrolytic capacitor according to an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional electrode foil for an electrolytic capacitor. 1... Valve metal foil, 2... Bump,
3...Oxide film, 5...Esochip 7, 6...Excessive etching. Name of agent: Patent attorney Toshio Nakao Hakaichimeika 1 Figure /-Ichito action court foil Figure 2

Claims (2)

【特許請求の範囲】[Claims] (1)弁作用金属の表面に多数の微細孔を有する前記弁
作用金属の酸化物を設けてなる電解コンデンサ用電極箔
(1) An electrode foil for an electrolytic capacitor comprising an oxide of a valve metal having a large number of micropores on the surface of the valve metal.
(2)弁作用金属の表面に多数の微小バンプを形成し、
しかるのちに、前記表面を酸化し、露出している前記弁
作用金属の表面に、前記弁作用金属の酸化皮膜を形成し
、そののちに、前記バンプを除去して、前記弁作用金属
の表面に多数の微細孔を有する前記弁作用金属の酸化物
を形成する電解コンデンサ用電極箔の製造方法。
(2) Forming a large number of micro bumps on the surface of the valve metal,
Thereafter, the surface is oxidized to form an oxide film of the valve metal on the exposed surface of the valve metal, and then the bumps are removed and the surface of the valve metal is oxidized. A method for manufacturing an electrode foil for an electrolytic capacitor, comprising forming an oxide of the valve metal having a large number of micropores.
JP17205386A 1986-07-22 1986-07-22 Electrode foil for electrolytic capacitor and manufacture of the same Pending JPS6328027A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17205386A JPS6328027A (en) 1986-07-22 1986-07-22 Electrode foil for electrolytic capacitor and manufacture of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17205386A JPS6328027A (en) 1986-07-22 1986-07-22 Electrode foil for electrolytic capacitor and manufacture of the same

Publications (1)

Publication Number Publication Date
JPS6328027A true JPS6328027A (en) 1988-02-05

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Family Applications (1)

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JP17205386A Pending JPS6328027A (en) 1986-07-22 1986-07-22 Electrode foil for electrolytic capacitor and manufacture of the same

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JP (1) JPS6328027A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007016255A (en) * 2005-07-05 2007-01-25 Sachiko Ono Aluminum material having superior etching characteristic for electrolytic capacitor electrode, manufacturing method therefor, electrode material for aluminum electrolytic capacitor, and aluminum electrolytic capacitor
JP2008166602A (en) * 2006-12-28 2008-07-17 Sachiko Ono Aluminum material for electrolytic capacitor electrode, its manufacturing method, electrode material for aluminum electrolytic capacitor and aluminum electrolytic capacitor
JP2011063887A (en) * 2010-11-05 2011-03-31 Sachiko Ono Method for producing aluminum electrode material for electrolytic capacitor excellent in etching characteristic, aluminum electrode material for electrolytic capacitor, and aluminum electrolytic capacitor
JP2012094914A (en) * 2012-02-03 2012-05-17 Sachiko Ono Aluminum material for electrolytic capacitor electrode, its manufacturing method, electrode material for aluminum electrolytic capacitor and aluminum electrolytic capacitor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007016255A (en) * 2005-07-05 2007-01-25 Sachiko Ono Aluminum material having superior etching characteristic for electrolytic capacitor electrode, manufacturing method therefor, electrode material for aluminum electrolytic capacitor, and aluminum electrolytic capacitor
JP2008166602A (en) * 2006-12-28 2008-07-17 Sachiko Ono Aluminum material for electrolytic capacitor electrode, its manufacturing method, electrode material for aluminum electrolytic capacitor and aluminum electrolytic capacitor
JP2011063887A (en) * 2010-11-05 2011-03-31 Sachiko Ono Method for producing aluminum electrode material for electrolytic capacitor excellent in etching characteristic, aluminum electrode material for electrolytic capacitor, and aluminum electrolytic capacitor
JP2012094914A (en) * 2012-02-03 2012-05-17 Sachiko Ono Aluminum material for electrolytic capacitor electrode, its manufacturing method, electrode material for aluminum electrolytic capacitor and aluminum electrolytic capacitor

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