JPS632764U - - Google Patents
Info
- Publication number
- JPS632764U JPS632764U JP9557286U JP9557286U JPS632764U JP S632764 U JPS632764 U JP S632764U JP 9557286 U JP9557286 U JP 9557286U JP 9557286 U JP9557286 U JP 9557286U JP S632764 U JPS632764 U JP S632764U
- Authority
- JP
- Japan
- Prior art keywords
- magnetron
- vapor deposition
- electrode
- bombarded
- physical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 238000005240 physical vapour deposition Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9557286U JPS632764U (es) | 1986-06-23 | 1986-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9557286U JPS632764U (es) | 1986-06-23 | 1986-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS632764U true JPS632764U (es) | 1988-01-09 |
Family
ID=30960263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9557286U Pending JPS632764U (es) | 1986-06-23 | 1986-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS632764U (es) |
-
1986
- 1986-06-23 JP JP9557286U patent/JPS632764U/ja active Pending
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