JPS6326497A - ガス置換回収装置 - Google Patents
ガス置換回収装置Info
- Publication number
- JPS6326497A JPS6326497A JP16952786A JP16952786A JPS6326497A JP S6326497 A JPS6326497 A JP S6326497A JP 16952786 A JP16952786 A JP 16952786A JP 16952786 A JP16952786 A JP 16952786A JP S6326497 A JPS6326497 A JP S6326497A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- container
- replacement
- liquefied
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000011084 recovery Methods 0.000 title claims description 23
- 238000001816 cooling Methods 0.000 claims abstract description 17
- 230000008016 vaporization Effects 0.000 claims abstract 3
- 239000007788 liquid Substances 0.000 claims description 4
- 230000006835 compression Effects 0.000 claims 3
- 238000007906 compression Methods 0.000 claims 3
- 238000001035 drying Methods 0.000 claims 3
- 238000006467 substitution reaction Methods 0.000 claims 3
- 238000009834 vaporization Methods 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 156
- 239000006200 vaporizer Substances 0.000 abstract description 7
- 239000000203 mixture Substances 0.000 abstract description 3
- 229910018503 SF6 Inorganic materials 0.000 description 32
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 32
- 238000000034 method Methods 0.000 description 11
- 239000003595 mist Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000002274 desiccant Substances 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical class O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/06—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by partial condensation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Separation By Low-Temperature Treatments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16952786A JPS6326497A (ja) | 1986-07-17 | 1986-07-17 | ガス置換回収装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16952786A JPS6326497A (ja) | 1986-07-17 | 1986-07-17 | ガス置換回収装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6326497A true JPS6326497A (ja) | 1988-02-04 |
| JPH0578718B2 JPH0578718B2 (enExample) | 1993-10-29 |
Family
ID=15888153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16952786A Granted JPS6326497A (ja) | 1986-07-17 | 1986-07-17 | ガス置換回収装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6326497A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001110284A (ja) * | 1999-10-01 | 2001-04-20 | Toshiba Corp | ガス回収装置 |
| JP2005188717A (ja) * | 2003-12-26 | 2005-07-14 | Daido Air Products Electronics Kk | ガス回収方法およびガス回収装置ならびにガス回収システム |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4884807A (enExample) * | 1972-02-16 | 1973-11-10 | ||
| JPS4944777A (enExample) * | 1972-05-31 | 1974-04-27 |
-
1986
- 1986-07-17 JP JP16952786A patent/JPS6326497A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4884807A (enExample) * | 1972-02-16 | 1973-11-10 | ||
| JPS4944777A (enExample) * | 1972-05-31 | 1974-04-27 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001110284A (ja) * | 1999-10-01 | 2001-04-20 | Toshiba Corp | ガス回収装置 |
| EP1091182A3 (en) * | 1999-10-01 | 2002-01-16 | Kabushiki Kaisha Toshiba | Gas reclaiming equipment |
| JP2005188717A (ja) * | 2003-12-26 | 2005-07-14 | Daido Air Products Electronics Kk | ガス回収方法およびガス回収装置ならびにガス回収システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0578718B2 (enExample) | 1993-10-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5283035A (en) | Method for recovering a sterilizing gas | |
| JP3919816B2 (ja) | 天然ガスの処理方法 | |
| EP0302285A1 (en) | Process and apparatus for cryogenic cooling using liquid carbon dioxide as a refrigerating agent | |
| KR20110036767A (ko) | 상승 압력에서의 반승화에 의한 이산화탄소 추출 방법 및 시스템 | |
| US3854913A (en) | Recovery of neon and helium from air by adsorption and closed cycle helium refrigeration | |
| CN2938373Y (zh) | Sf6充气及回收装置 | |
| CN108607326A (zh) | 一种带有热吹扫脱附的冷凝+吸附集成VOCs排放控制系统及其处理方法 | |
| JP4033591B2 (ja) | Sf6ガス回収装置 | |
| KR860001329A (ko) | 고순도 질소가스 제조장치 | |
| JPS6326497A (ja) | ガス置換回収装置 | |
| JP7562632B2 (ja) | 絶縁材として使用するための代替的ガス混合物の分離方法 | |
| US3057167A (en) | Process and apparatus for separating helium from helium-air mixtures | |
| CN111547685B (zh) | 封闭空间内低浓度sf6气体回收处理装置和方法 | |
| US1939696A (en) | Separation of gases | |
| EP0514860B1 (en) | Expanding apparatus for agricultural product such as tobacco material | |
| JP2000288331A (ja) | 混合ガスから凝縮性ガスを回収する凝縮性ガス回収装置及び同装置を用いた凝縮性ガス回収方法 | |
| US6164088A (en) | Method for recovering condensable gas from mixed gas and condensable gas recovering apparatus | |
| CN206695507U (zh) | 医疗保健气体集成式制取和供给装置 | |
| GB2090160A (en) | Process and Apparatus for Separating a Mixed Gas Such as Air | |
| JP2000015039A (ja) | 六弗化硫黄ガス回収再生装置 | |
| JP2000102123A (ja) | 凝縮性ガス回収装置 | |
| JPS634483Y2 (enExample) | ||
| JPH11244643A (ja) | 絶縁ガス回収充填装置 | |
| JP3195986B2 (ja) | ヘリウムガス供給方法及び装置 | |
| JP3259099B2 (ja) | 超高純度窒素製造装置及びその起動方法 |