JPS6326497A - Gas replacement recovery device - Google Patents
Gas replacement recovery deviceInfo
- Publication number
- JPS6326497A JPS6326497A JP16952786A JP16952786A JPS6326497A JP S6326497 A JPS6326497 A JP S6326497A JP 16952786 A JP16952786 A JP 16952786A JP 16952786 A JP16952786 A JP 16952786A JP S6326497 A JPS6326497 A JP S6326497A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- container
- replacement
- liquefied
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000011084 recovery Methods 0.000 title claims description 23
- 238000001816 cooling Methods 0.000 claims abstract description 17
- 230000008016 vaporization Effects 0.000 claims abstract 3
- 239000007788 liquid Substances 0.000 claims description 4
- 230000006835 compression Effects 0.000 claims 3
- 238000007906 compression Methods 0.000 claims 3
- 238000001035 drying Methods 0.000 claims 3
- 238000006467 substitution reaction Methods 0.000 claims 3
- 238000009834 vaporization Methods 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 156
- 239000006200 vaporizer Substances 0.000 abstract description 7
- 239000000203 mixture Substances 0.000 abstract description 3
- 229910018503 SF6 Inorganic materials 0.000 description 32
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 32
- 238000000034 method Methods 0.000 description 11
- 239000003595 mist Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000002274 desiccant Substances 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical class O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/06—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by partial condensation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Separation By Low-Temperature Treatments (AREA)
Abstract
Description
【発明の詳細な説明】
(a) 産業上の利用分野
本発明は非耐圧性容器内の空気を効率よくガス置換し、
その置換の際にガスの損失を少なくすると共に、容器内
のガスを損失少なく回収し、再利用するガス置換回収装
置に関するものである。[Detailed description of the invention] (a) Industrial application field The present invention efficiently replaces air in a non-pressure resistant container with gas,
The present invention relates to a gas replacement and recovery device that reduces gas loss during gas replacement, and recovers and reuses gas in a container with less loss.
(b) 従来の技術
一般に容器内のガスを池のガスにより完全に置換する方
法としては、耐圧性容器の場合は、容器内を真空に排気
したのち、目的とするガスを導入する方法、高圧のガス
を充填したのち常圧まで排出し、これを所定のガスの純
度になるまで繰返す方法が用いられる。非耐圧容器をガ
ス置換する場合は上記の方法を用いることができないの
で、目的とするガスをガス置換すべき容器内に流し、徐
々にガス置換をして、容器内のガスの純度が所定の純度
になる迄ガスを流通させる方法が用いられている。また
容器内に充填したガスを回収する場合には、容器内のガ
スを圧縮機及び真空ポンプにより大気圧又はそれ以下ま
で吸引することにより回収が貸なわれている。(b) Conventional technology In general, methods for completely replacing the gas in a container with gas from a pond include, in the case of a pressure-resistant container, a method in which the inside of the container is evacuated to a vacuum, and then the target gas is introduced; A method is used in which the gas is filled with gas, then discharged to normal pressure, and this process is repeated until a predetermined gas purity is reached. When replacing gas in a non-pressure-resistant container, the above method cannot be used, so the target gas is poured into the container to be replaced, and the gas is replaced gradually until the purity of the gas in the container reaches the specified level. A method is used in which gas is circulated until it reaches purity. In addition, when recovering gas filled in a container, the gas in the container is sucked up to atmospheric pressure or lower using a compressor and a vacuum pump.
(C) 発明が解決しようとする問題点非耐圧性容器
を、従来のガス流通法によりガス置換を行うためには、
容器内のガス流路の構造及び目的とする置換ガス純度に
より、容器容積の数倍〜数10倍のガスを流通させる必
要があり、例えば低電圧の小型遮断器、キユービクル等
の真空引きのできない電気機器内に絶縁ガスである六フ
ッ化硫黄(以下SF6と記す)を充填する場合に、従来
の流通法によりガス置換を行えば、高価なSF6ガスを
多量に必要とする。また従来の回収手段では、非耐圧性
容器に充填されたSF6ガスを回収することは不可能で
ある。(C) Problems to be Solved by the Invention In order to perform gas replacement in a non-pressure resistant container using the conventional gas flow method,
Depending on the structure of the gas flow path inside the container and the target purity of the replacement gas, it is necessary to circulate gas several times to several tens of times the volume of the container. When filling electrical equipment with sulfur hexafluoride (hereinafter referred to as SF6), which is an insulating gas, if gas replacement is performed using a conventional flow method, a large amount of expensive SF6 gas is required. Further, with conventional recovery means, it is impossible to recover SF6 gas filled in a non-pressure resistant container.
従って本発明は、非耐圧性容器内を流通法によりガス置
換する際に、ガスの損失が少なく、任意の純度迄ガス置
換を汚うことができるガス置換回収装置を提供すること
を目的とする。Therefore, an object of the present invention is to provide a gas replacement and recovery device that causes less loss of gas when replacing gas in a non-pressure resistant container by a flow method, and can pollute gas replacement to a desired purity level. .
(d) 問題点を解決するための手段上記目的を達成
すべく本発明者が鋭意研究を重ねた結果、容器内に置換
ガスを流通させ、排出された空気とガス与#ヌの混合物
を圧縮、冷却してガスのみを液化し、空気と分離して精
製したのち、その液化ガスを気化し、容器内に循環させ
ることにより、置換ガスの損失を少なく、所定濃度まで
容器内をガス置換することができること及びガスの入っ
た容器に大気が流入するようにした後、ガスと流入した
空気の混合物を吸引し、ガス分のみを液化分離して回収
しうろことを見出し、本発明を完成するに到った。(d) Means for Solving the Problems In order to achieve the above object, the inventor of the present invention has conducted extensive research, and as a result, the present inventor has developed a method of circulating displacement gas in the container and compressing the mixture of exhausted air and gas supply. After cooling and liquefying only the gas, separating it from air and purifying it, the liquefied gas is vaporized and circulated within the container, thereby reducing the loss of replacement gas and replacing the gas within the container to a predetermined concentration. They discovered that it is possible to allow air to flow into a container containing gas, then suck the mixture of gas and air, liquefy and separate only the gas content, and recover it, thus completing the present invention. reached.
次にSF6ガスにより置換する装置を例にあげ、図面に
より本発明の内容を詳細に説明する。第1図は8F6置
換用の本発明のガス置換回収装置の一例の系統図である
。Next, the contents of the present invention will be explained in detail with reference to the drawings, taking as an example an apparatus for replacing gas with SF6 gas. FIG. 1 is a system diagram of an example of the gas replacement recovery apparatus of the present invention for 8F6 replacement.
(1)はガス置換回収装置であって、SF6ガス絶縁機
器等のガス置換すべき容器(2)の上部口(3)及び下
部口(4)とそれぞれ連結する接続口A(5)及び接読
口B(6)を備えている。(1) is a gas replacement and recovery device, and has a connection port A (5) and a connection port connected to the upper port (3) and lower port (4), respectively, of the container (2) to be replaced with gas such as SF6 gas insulated equipment. Equipped with reading opening B (6).
接続口A(5)から弁(7)を経て四方切換弁(8)に
つながる配管(9)及び接続口B(6)から弁α0を経
て四方切換弁(8)の上記配管(9)と対向する位置に
つながる配WOυを設ける。四方切換弁(8)の他の1
つの口からドライヤ(6)に通ずる回収配管a3を設け
、その回収配w(13から分岐するバイパス配管Q傭こ
ガス濃度及び水分を測定する濃度水分計09を設ける。Piping (9) connecting from connection port A (5) to four-way switching valve (8) via valve (7) and piping (9) connecting from connection port B (6) to four-way switching valve (8) via valve α0. A wiring WOυ is provided that connects to the opposing position. Other 1 of the four-way switching valve (8)
A recovery pipe A3 leading to the dryer (6) from one opening is provided, and a bypass pipe Q branching from the recovery pipe W (13) is provided with a concentration/moisture meter 09 for measuring gas concentration and moisture.
更に接続口A(5)から弁(7)に到る配管の途中から
分岐して空気流入弁αQを経て大気に開口する空気導入
配Wαηを設ける。Further, an air introduction pipe Wαη is provided which branches from the middle of the piping from the connection port A (5) to the valve (7) and opens to the atmosphere via the air inflow valve αQ.
Vライヤαaから弁0(へ)を経てガス圧縮機−に通ず
るガス配管(4)を設け、ガス圧縮機−から出たガス配
管I21)は油分離器(イ)、空冷クーラ(イ)を経て
冷却分離器@に繋がる。ドライヤq2は活性ゼオライト
等の固体乾燥剤を充填した充填管よりなる。A gas pipe (4) is provided that leads from the V-liar αa to the gas compressor via valve 0 (to), and the gas pipe I21) coming out of the gas compressor is connected to an oil separator (a) and an air cooler (a). It then connects to the cooling separator @. The dryer q2 consists of a filled tube filled with a solid desiccant such as activated zeolite.
ガス圧縮機O0は往復動圧縮機、回転圧縮機等任意の公
知の圧縮機が用いられる。油分離器(イ)はガス圧縮機
a1で混入したオイルミストを除去するためのオイルミ
ストフィルタを備える。但しガス圧縮機がオイルレスタ
イプの場合は油分離器翰は省略される。As the gas compressor O0, any known compressor such as a reciprocating compressor or a rotary compressor can be used. The oil separator (a) is equipped with an oil mist filter for removing oil mist mixed in by the gas compressor a1. However, if the gas compressor is an oil-less type, the oil separator can be omitted.
空冷クーラー@はフィンチューブ及びファンを備え、ガ
ス圧縮機αlで圧縮され高温となったガスを一次冷却す
る。冷却分離器(ハ)には冷凍機@より低温の冷媒が循
環され、ガスを液化温度まで冷却し、気液を分離する。The air cooler@ is equipped with a fin tube and a fan, and primarily cools the gas that has been compressed by the gas compressor αl and has reached a high temperature. A refrigerant at a lower temperature than the refrigerator @ is circulated through the cooling separator (c) to cool the gas to the liquefaction temperature and separate the gas and liquid.
分離された液化ガスは冷却分離器(ハ)の低部に貯蔵さ
れる。The separated liquefied gas is stored in the lower part of the cooling separator (c).
冷却分離器(ハ)から液化ガス配管(至)及び非凝縮ガ
スの排気管(イ)が出て、液化ガス配管(至)は気化器
@に繋がり、気化器弼から弁翰を経て前記四方切換弁(
8)の他の口に繋がるガス送出配管−を設ける。A liquefied gas pipe (to) and a non-condensable gas exhaust pipe (a) come out from the cooling separator (c), and the liquefied gas pipe (to) connects to the vaporizer @, and from the vaporizer (bottom) via the valve handle, the four directions are connected. Switching valve (
8) Provide a gas delivery pipe connected to the other port.
一方ドライヤ(2)から弁(至)へのガス配管■の途中
より分岐して、弁(7)、ブロワ6])及び弁0りを経
て、弁(イ)から四方切換弁(8)に通ずるガス送出配
管1囚に合流するガス循環配管(至)を設ける。更にS
F6ガスボンベ(図示せず)に接読するガス供給口図か
らのガス共給配管(7)が冷却分離器シ→から気化器(
ト)に到る液化ガス配管(ト)に合流する。On the other hand, the gas piping from the dryer (2) to the valve (to) branches from the middle, passes through the valve (7), the blower 6) and the valve 0, and then goes from the valve (a) to the four-way switching valve (8). A gas circulation pipe (toward) is provided that joins the first gas delivery pipe. Furthermore, S
The gas common supply pipe (7) from the gas supply port diagram that connects to the F6 gas cylinder (not shown) is connected from the cooling separator → to the vaporizer (
It joins the liquefied gas pipe (g) that leads to (g).
(e) 作用
次に第1図に示すガス置換回収装置の動作について説明
する。先ずS F6ガス絶縁機器等の容器(2)内にS
F6ガスを置換する場合には、四方切換弁(8)を第1
図に実線で示す方向に切換えておき、SF6ガスボンベ
よりガス供給口■を経て、液化SF6ガスを導入し、気
化器翰で完全に気化減圧し、四方切換弁(8)、接続口
B(6)、下部口(4)を経て容器(2)内にSF6ガ
スを導入する。同時に空気とSF6ガスの混合ガスが容
器(2)の上部口(3)より排出され、これに連結され
たガス置換回収装置(1)の接続口A(5)より四方切
換弁(8)を経てドヤイヤ(イ)に導入され、微量の水
分を除かれて完全に乾燥された後、ガス圧縮機α)に導
入されて30 kg f / cyl 0以上に圧縮さ
れる。圧縮された混合ガスは油分離器(イ)でオイルミ
ストを除去され、空冷クーラに)で常温付近まで冷却さ
れたのち、冷却分離器(ハ)でガスの圧力に応じ一20
°C以下に冷却され、SF6ガスの殆んどがの
液化される。液化したSF6@冷却温度における蒸気圧
だけの微量のSF6ガスを含む空気等の非凝縮ガスが冷
却分離器(ハ)で気液分離され気体は、排気管勾より排
出される。液化SF6はボンベからのSF6と同時に又
はこれに代えて気化器(ト)に送られ、はぼ常圧に迄減
圧、加熱して気化され、四方切換弁(8)を経てSF6
ガス絶縁機器の容器(1)に循環される。(e) Operation Next, the operation of the gas replacement and recovery apparatus shown in FIG. 1 will be explained. First, put S into the container (2) for S F6 gas insulated equipment, etc.
When replacing F6 gas, set the four-way switching valve (8) to the first
Switch to the direction shown by the solid line in the figure, introduce liquefied SF6 gas from the SF6 gas cylinder via gas supply port ), SF6 gas is introduced into the container (2) through the lower port (4). At the same time, a mixed gas of air and SF6 gas is discharged from the upper port (3) of the container (2), and the four-way switching valve (8) is connected to the connection port A (5) of the gas replacement and recovery device (1) connected to this. After that, it is introduced into a dryer (a), where a small amount of moisture is removed and completely dried, and then introduced into a gas compressor α) where it is compressed to 30 kg f/cyl 0 or more. The compressed mixed gas is removed with oil mist in an oil separator (a), cooled down to around room temperature in an air cooler), and then cooled down to around room temperature in a cooling separator (c), where the oil mist is removed depending on the gas pressure.
It is cooled to below °C, and most of the SF6 gas is liquefied. A non-condensable gas such as air containing a trace amount of SF6 gas corresponding to the vapor pressure of the liquefied SF6@cooling temperature is separated into gas and liquid by the cooling separator (c), and the gas is discharged from the exhaust pipe gradient. The liquefied SF6 is sent to the vaporizer (G) at the same time or in place of the SF6 from the cylinder, is depressurized to almost normal pressure, heated and vaporized, and then passes through the four-way switching valve (8) to become SF6.
It is circulated to the container (1) of the gas insulated equipment.
回収ガスがドライヤ(イ)に入る前にその一部を濃度水
分計09に通し、回収ガスの濃度を測定し、所定のSF
6ガス濃度に達すれば装置の運転を停止し、容器から切
離す。Before the recovered gas enters the dryer (A), a part of it is passed through the concentration moisture meter 09 to measure the concentration of the recovered gas, and the concentration of the recovered gas is measured.
When the concentration of 6 gases is reached, the operation of the device is stopped and it is disconnected from the container.
容器(1)内のSF6が所定濃度に達したのち、更に容
器内を乾燥させる必要がある場合には、弁α鴫及び弁Q
)を閉じ、弁(7)及び弁0つを開き、ブロワ61)を
運転して、ドライヤ@及びガス循環配W(ハ)を経て容
器(1)内にガスを循環し、濃度水分計00で測定した
水分量が所定値に達する迄SF6ガスの循環を続ける。After the SF6 in the container (1) reaches a predetermined concentration, if it is necessary to further dry the inside of the container, use the valves α and Q.
), open the valve (7) and valve 0, operate the blower 61), circulate the gas into the container (1) via the dryer @ and the gas circulation distribution W (c), and set the concentration moisture meter 00. The circulation of SF6 gas is continued until the moisture content measured in step reaches a predetermined value.
又本発明のガス置換回収装置により、容器内に充填され
たSF6等のガスを空気等と置換して回収することもで
きる。例えば第1図の装置により容器(1)内のSF6
ガスを回収する場合には、四方切換弁(8)を第1図の
点線で示す回収位置に切換え、弁(7)を閉じ、空気流
入弁Qflを閉放して、接続口A(5)より容器(1)
内へ空気が流入するようにした後、ガス圧縮機四を運転
して容器内のガスを吸引する。Furthermore, the gas replacement and recovery device of the present invention can also recover gas such as SF6 filled in a container by replacing it with air or the like. For example, the SF6 in the container (1) is
When recovering gas, switch the four-way switching valve (8) to the recovery position shown by the dotted line in Figure 1, close the valve (7), close the air inflow valve Qfl, and open the air from the connection port A (5). Container (1)
After allowing air to flow into the container, the gas compressor 4 is operated to suck the gas inside the container.
吸引されたSF6と空気の混合ガスは加圧冷却され、冷
却分離器(至)で液化SF5が分離される。分離回収さ
れたSF6は液化ガス回収弁■を経て取出すこともでき
る。The sucked mixed gas of SF6 and air is cooled under pressure, and liquefied SF5 is separated in a cooling separator. The separated and recovered SF6 can also be taken out via the liquefied gas recovery valve (2).
上記のガス置換回収装置の運転中、接続口A(5)又は
接続口B(6)におけるガスの圧力を測定し、その圧力
が常に+0.2〜−〇、 2 kg f /cyAG程
度のほぼ常圧となるように、ガス圧縮閤a9及び気化器
翰又はブロワ6ηの運転を自動的に調節する。During operation of the above gas replacement and recovery device, the gas pressure at connection port A (5) or connection port B (6) is measured, and the pressure is always approximately +0.2 to -0, approximately 2 kg f /cyAG. The operation of the gas compressor a9 and the vaporizer or blower 6η is automatically adjusted so that the pressure becomes normal.
上記の説明では、SF6ガスで置換し、これを回収する
場合を例にあげて説明したが、本発明のガス置換回収装
置は、SF6ガスで置換する場合に限定されず、フロン
ガス等、液上可能なあらゆるガスの置換及び回収に用い
られる。In the above explanation, the case where the gas is replaced with SF6 gas and recovered is explained as an example. However, the gas replacement and recovery device of the present invention is not limited to the case where the gas is replaced with SF6 gas. Used for the replacement and recovery of all possible gases.
(f) 実施例
容積5HのSF6ガス絶縁機器を本発明のガス置換装置
によりSF6ガスで置換した。ガス圧縮機の吸入ガス量
16.2m/hrで33 kg f / c4 Gまで
加圧し、冷却分離器の冷却温度を一25°Cとしたとき
、1時間30分以内の運転でSF6ガス濃度が90%に
達した。(f) Example An SF6 gas insulated device having a volume of 5H was replaced with SF6 gas using the gas replacement device of the present invention. When the gas compressor takes in gas at a rate of 16.2 m/hr and pressurizes to 33 kg f/c4 G, and the cooling temperature of the cooling separator is -25°C, the SF6 gas concentration can be reduced within 1 hour and 30 minutes of operation. It reached 90%.
このとき、
置換時にボンベより供給したSF6ガス量60kg置換
後の機器内SF6ガス量 34kg冷却分
離器で分離して回収されたガス量11kg空気とともに
排気され消費されたガス111kgであった。従ってガ
スの置換効率は
であった。At this time, the amount of SF6 gas supplied from the cylinder during replacement was 60 kg, the amount of SF6 gas in the equipment after replacement was 34 kg, the amount of gas separated and recovered by the cooling separator was 11 kg, and the gas exhausted and consumed together with air was 111 kg. Therefore, the gas replacement efficiency was.
次にこの90%SF6ガスを封入した内容積5〃iのS
F6ガス絶縁機器から本発明の装置を用い、上記と同じ
運転条件によりSF6ガスの回収を貸っだ所、1時間1
0分以内の運転時間で、23kgの液化SF6ガスを回
収した。従って回収効率はであった。Next, S with an internal volume of 5 i filled with this 90% SF6 gas
SF6 gas was collected from F6 gas insulated equipment using the device of the present invention under the same operating conditions as above for 1 hour.
23 kg of liquefied SF6 gas was recovered in less than 0 minutes of operation time. Therefore, the recovery efficiency was.
(g) 発明の効果
本発明のガス置換装置によれば、非耐圧性の容器内の圧
力をほぼ常圧に保ちながら、流通法により任意の濃度迄
ガス置換することができ、その際に、空気等と共に排出
されるガスを液化分離して回収し循環することができる
ので、ガス置換の際のガスの損失が少なく、高い置換効
率を達成することができる。(g) Effects of the Invention According to the gas replacement device of the present invention, gas can be replaced to an arbitrary concentration by a flow method while maintaining the pressure inside the non-pressure resistant container at approximately normal pressure, and at that time, Since the gas discharged together with air etc. can be liquefied and separated, recovered and circulated, there is little loss of gas during gas replacement and high replacement efficiency can be achieved.
又非耐圧性容器内に充填されたガスを、容器内を常圧に
保ちながら、液とガスとして効率よく回収することがで
きる。Further, the gas filled in the non-pressure resistant container can be efficiently recovered as liquid and gas while maintaining the inside of the container at normal pressure.
更に、ガスをドライヤに通して循環すれば、容器内を完
全に乾燥させることができる。Furthermore, if the gas is circulated through a dryer, the inside of the container can be completely dried.
第1図は、本発明のガス置換装置の一例の系統図である
。
(1)・・・ガス置換装置、 (2)・・・容器、(
3)・・・上部口、 (4)・・・下部口、(
5)・・・接続口A(6)・・・接続口B、(7)、α
0、α(へ)、罰、(至)、(イ)・・・弁、(8)・
・・四方切換弁、 (9)、01)・・・配管、(
至)・・・ドライヤ、 α1・・・回収配管、α
→・・・バイパス配管、 αQ・・・濃度水分計、(
lilG・・・空気流入弁、 (17)・・・空気
導入配管、al・・・ガス圧縮機、 翰、Ql)・
・・ガス配管、(イ)・・・油分離器、 @・・
・空冷クーラ、(ハ)・・・冷却分離器、 (至)
・・・冷凍機、@・・・液化ガス配管、 勾・・・排
気管、(4)・・・気化器、 (イ)・・・ガ
ス送出配管、(ロ)・・・ブロワ、 (ト)・
・・ガス循環配管、(ロ)・・・ガス供給口、 (
7)・・・ガス供給配管、(7)・・・液化ガス回収弁
。FIG. 1 is a system diagram of an example of the gas replacement apparatus of the present invention. (1)...Gas replacement device, (2)...Container, (
3)...Top opening, (4)...Bottom opening, (
5)... Connection port A (6)... Connection port B, (7), α
0, α (to), punishment, (to), (i)... valve, (8).
... Four-way switching valve, (9), 01) ... Piping, (
To)...Dryer, α1...Recovery piping, α
→...Bypass piping, αQ...Concentration moisture meter, (
lilG...Air inflow valve, (17)...Air introduction pipe, al...Gas compressor, Kan, Ql)・
...Gas piping, (a)...Oil separator, @...
・Air cooler, (c)...Cooling separator, (to)
... Refrigerator, @... Liquefied gas piping, Incline... Exhaust pipe, (4)... Vaporizer, (A)... Gas delivery piping, (B)... Blower, (T)... )・
...Gas circulation piping, (b)...Gas supply port, (
7)... Gas supply piping, (7)... Liquefied gas recovery valve.
Claims (3)
て気化し置換すべき容器に導入する気化手段と、導入し
た該置換ガスにより押出され置換すべき容器から排出さ
れた混合ガスを圧縮する圧縮手段と、該圧縮手段からの
圧縮混合ガスを該混合ガス中の該置換ガスのその圧力下
における液化温度以下に冷却して液化する冷却手段と、
該混合ガスから液化された置換ガスと非凝縮ガスを気液
分離して液化された置換ガスを回収する分離回収手段と
を備え、回収された該液化置換ガスを該気化手段に循環
するようにしたことを特徴とするガス置換回収装置。(1) Vaporization means that reduces the pressure of high-pressure liquefied replacement gas to almost normal pressure, vaporizes it, and introduces it into the container to be replaced, and a mixed gas that is pushed out by the introduced replacement gas and discharged from the container to be replaced. a compression means for compressing; a cooling means for cooling and liquefying the compressed mixed gas from the compression means to a temperature below the liquefaction temperature of the replacement gas in the mixed gas under the pressure thereof;
a separation and recovery means for separating the liquefied substitution gas and non-condensable gas from the mixed gas into gas and liquid and recovering the liquefied substitution gas, and circulating the recovered liquefied substitution gas to the vaporization means. A gas replacement recovery device characterized by:
縮手段に導入する前に乾燥する乾燥手段を備えた特許請
求の範囲第1項記載のガス置換回収装置。(2) The gas replacement and recovery device according to claim 1, further comprising drying means for drying the mixed gas discharged from the container to be replaced before introducing it into the compression means.
送風して該置換すべき容器に導入する循環手段を備えた
特許請求の範囲第2項記載のガス置換回収装置。(3) The gas replacement and recovery device according to claim 2, further comprising circulation means for directly blowing the mixed gas dried by the drying means and introducing it into the container to be replaced.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16952786A JPS6326497A (en) | 1986-07-17 | 1986-07-17 | Gas replacement recovery device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16952786A JPS6326497A (en) | 1986-07-17 | 1986-07-17 | Gas replacement recovery device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6326497A true JPS6326497A (en) | 1988-02-04 |
JPH0578718B2 JPH0578718B2 (en) | 1993-10-29 |
Family
ID=15888153
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16952786A Granted JPS6326497A (en) | 1986-07-17 | 1986-07-17 | Gas replacement recovery device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6326497A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1091182A2 (en) * | 1999-10-01 | 2001-04-11 | Kabushiki Kaisha Toshiba | Gas reclaiming equipment |
JP2005188717A (en) * | 2003-12-26 | 2005-07-14 | Daido Air Products Electronics Kk | Method of recovering gas and gas recovery device and gas recovery system |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4884807A (en) * | 1972-02-16 | 1973-11-10 | ||
JPS4944777A (en) * | 1972-05-31 | 1974-04-27 |
-
1986
- 1986-07-17 JP JP16952786A patent/JPS6326497A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4884807A (en) * | 1972-02-16 | 1973-11-10 | ||
JPS4944777A (en) * | 1972-05-31 | 1974-04-27 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1091182A2 (en) * | 1999-10-01 | 2001-04-11 | Kabushiki Kaisha Toshiba | Gas reclaiming equipment |
JP2001110284A (en) * | 1999-10-01 | 2001-04-20 | Toshiba Corp | Gas collecting device |
EP1091182A3 (en) * | 1999-10-01 | 2002-01-16 | Kabushiki Kaisha Toshiba | Gas reclaiming equipment |
JP2005188717A (en) * | 2003-12-26 | 2005-07-14 | Daido Air Products Electronics Kk | Method of recovering gas and gas recovery device and gas recovery system |
Also Published As
Publication number | Publication date |
---|---|
JPH0578718B2 (en) | 1993-10-29 |
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