JPS6326322B2 - - Google Patents
Info
- Publication number
- JPS6326322B2 JPS6326322B2 JP3869280A JP3869280A JPS6326322B2 JP S6326322 B2 JPS6326322 B2 JP S6326322B2 JP 3869280 A JP3869280 A JP 3869280A JP 3869280 A JP3869280 A JP 3869280A JP S6326322 B2 JPS6326322 B2 JP S6326322B2
- Authority
- JP
- Japan
- Prior art keywords
- defect
- comparator
- unit
- lower limit
- photodetector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007547 defect Effects 0.000 claims description 84
- 238000001514 detection method Methods 0.000 claims description 15
- 238000007689 inspection Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 238000001914 filtration Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 8
- 239000013256 coordination polymer Substances 0.000 description 6
- 238000001228 spectrum Methods 0.000 description 4
- 239000008186 active pharmaceutical agent Substances 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 101001076732 Homo sapiens RNA-binding protein 27 Proteins 0.000 description 1
- 102100025873 RNA-binding protein 27 Human genes 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3869280A JPS56134735A (en) | 1980-03-26 | 1980-03-26 | Deficiency detector for regular pattern |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3869280A JPS56134735A (en) | 1980-03-26 | 1980-03-26 | Deficiency detector for regular pattern |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56134735A JPS56134735A (en) | 1981-10-21 |
| JPS6326322B2 true JPS6326322B2 (enrdf_load_stackoverflow) | 1988-05-30 |
Family
ID=12532345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3869280A Granted JPS56134735A (en) | 1980-03-26 | 1980-03-26 | Deficiency detector for regular pattern |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56134735A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58170823U (ja) * | 1982-05-08 | 1983-11-15 | ニチコン株式会社 | コンデンサ |
| JPS6016532U (ja) * | 1983-07-08 | 1985-02-04 | 日新電機株式会社 | モ−ルド形コンデンサ |
-
1980
- 1980-03-26 JP JP3869280A patent/JPS56134735A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56134735A (en) | 1981-10-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4223346A (en) | Automatic defect detecting inspection apparatus | |
| US7397552B2 (en) | Optical inspection with alternating configurations | |
| US5118195A (en) | Area scan camera system for detecting streaks and scratches | |
| JPH0674907A (ja) | 透明板状体の欠点検出方法 | |
| CN108885185B (zh) | 用于校正从目标裸片及参考裸片的比较所产生的差异图像的系统、方法及计算机程序产品 | |
| KR102188625B1 (ko) | 웨이퍼 검사용 로직에서의 패턴 억제 | |
| JP2003106980A (ja) | 微小粒子群の計測装置および計測方法 | |
| JPH05100413A (ja) | 異物検査装置 | |
| JPS6326322B2 (enrdf_load_stackoverflow) | ||
| JP3185878B2 (ja) | 光学的検査装置 | |
| JPS6326321B2 (enrdf_load_stackoverflow) | ||
| KR102190835B1 (ko) | 타겟 콤포넌트 및 기준 콤포넌트에 대한 일관된 변조를 사용하여 제조된 타깃 콤포넌트에서의 결함을 검출하기 위한 시스템, 방법, 및 컴퓨터 프로그램 제품 | |
| JPH0236339A (ja) | 光による欠点検査装置 | |
| JPH11201909A (ja) | 異物検査方法および装置 | |
| JP2002372499A (ja) | 周期性欠陥検査方法及び装置 | |
| JPS5887530A (ja) | 規則性パタ−ンの欠陥検査装置 | |
| JP4273246B2 (ja) | フォトマスクの欠陥検査装置 | |
| JP2024139014A (ja) | 撮像装置、外観検査システム、ノイズ除去方法及び撮像システム | |
| JP3474619B2 (ja) | ２重映り検査方法 | |
| JPS6410044B2 (enrdf_load_stackoverflow) | ||
| JPS632041B2 (enrdf_load_stackoverflow) | ||
| JPH0134322B2 (enrdf_load_stackoverflow) | ||
| JPS59154343A (ja) | 規則性開口パタ−ンの共通欠陥検出装置 | |
| JPH09218163A (ja) | 異物検査装置における信号処理方法 | |
| JPH11194097A (ja) | 異物検査装置 |