JPS56134735A - Deficiency detector for regular pattern - Google Patents

Deficiency detector for regular pattern

Info

Publication number
JPS56134735A
JPS56134735A JP3869280A JP3869280A JPS56134735A JP S56134735 A JPS56134735 A JP S56134735A JP 3869280 A JP3869280 A JP 3869280A JP 3869280 A JP3869280 A JP 3869280A JP S56134735 A JPS56134735 A JP S56134735A
Authority
JP
Japan
Prior art keywords
plane
right angle
pattern
deficiencies
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3869280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6326322B2 (enrdf_load_stackoverflow
Inventor
Nobuo Tsumita
Shunsuke Mukasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP3869280A priority Critical patent/JPS56134735A/ja
Publication of JPS56134735A publication Critical patent/JPS56134735A/ja
Publication of JPS6326322B2 publication Critical patent/JPS6326322B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP3869280A 1980-03-26 1980-03-26 Deficiency detector for regular pattern Granted JPS56134735A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3869280A JPS56134735A (en) 1980-03-26 1980-03-26 Deficiency detector for regular pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3869280A JPS56134735A (en) 1980-03-26 1980-03-26 Deficiency detector for regular pattern

Publications (2)

Publication Number Publication Date
JPS56134735A true JPS56134735A (en) 1981-10-21
JPS6326322B2 JPS6326322B2 (enrdf_load_stackoverflow) 1988-05-30

Family

ID=12532345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3869280A Granted JPS56134735A (en) 1980-03-26 1980-03-26 Deficiency detector for regular pattern

Country Status (1)

Country Link
JP (1) JPS56134735A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58170823U (ja) * 1982-05-08 1983-11-15 ニチコン株式会社 コンデンサ
JPS6016532U (ja) * 1983-07-08 1985-02-04 日新電機株式会社 モ−ルド形コンデンサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58170823U (ja) * 1982-05-08 1983-11-15 ニチコン株式会社 コンデンサ
JPS6016532U (ja) * 1983-07-08 1985-02-04 日新電機株式会社 モ−ルド形コンデンサ

Also Published As

Publication number Publication date
JPS6326322B2 (enrdf_load_stackoverflow) 1988-05-30

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