JPS6325705B2 - - Google Patents

Info

Publication number
JPS6325705B2
JPS6325705B2 JP58237013A JP23701383A JPS6325705B2 JP S6325705 B2 JPS6325705 B2 JP S6325705B2 JP 58237013 A JP58237013 A JP 58237013A JP 23701383 A JP23701383 A JP 23701383A JP S6325705 B2 JPS6325705 B2 JP S6325705B2
Authority
JP
Japan
Prior art keywords
holding
cam
stem
holding part
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58237013A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60128632A (ja
Inventor
Hidetoshi Ichiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP23701383A priority Critical patent/JPS60128632A/ja
Publication of JPS60128632A publication Critical patent/JPS60128632A/ja
Publication of JPS6325705B2 publication Critical patent/JPS6325705B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Control Of Position Or Direction (AREA)
JP23701383A 1983-12-15 1983-12-15 位置決め装置 Granted JPS60128632A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23701383A JPS60128632A (ja) 1983-12-15 1983-12-15 位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23701383A JPS60128632A (ja) 1983-12-15 1983-12-15 位置決め装置

Publications (2)

Publication Number Publication Date
JPS60128632A JPS60128632A (ja) 1985-07-09
JPS6325705B2 true JPS6325705B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-05-26

Family

ID=17009090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23701383A Granted JPS60128632A (ja) 1983-12-15 1983-12-15 位置決め装置

Country Status (1)

Country Link
JP (1) JPS60128632A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565444A (en) * 1978-11-09 1980-05-16 Toshiba Corp Positioning method and apparatus therefor
JPS5565445A (en) * 1978-11-13 1980-05-16 Toshiba Corp Positioning device for plate-shaped body

Also Published As

Publication number Publication date
JPS60128632A (ja) 1985-07-09

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