JPS6325644B2 - - Google Patents
Info
- Publication number
- JPS6325644B2 JPS6325644B2 JP59239203A JP23920384A JPS6325644B2 JP S6325644 B2 JPS6325644 B2 JP S6325644B2 JP 59239203 A JP59239203 A JP 59239203A JP 23920384 A JP23920384 A JP 23920384A JP S6325644 B2 JPS6325644 B2 JP S6325644B2
- Authority
- JP
- Japan
- Prior art keywords
- optical
- guide
- optical waveguide
- etching
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 86
- 239000013307 optical fiber Substances 0.000 claims description 39
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 35
- 238000005530 etching Methods 0.000 claims description 35
- 239000000758 substrate Substances 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 21
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000000059 patterning Methods 0.000 claims description 4
- 238000000206 photolithography Methods 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 claims description 2
- 239000000835 fiber Substances 0.000 description 13
- 229910021417 amorphous silicon Inorganic materials 0.000 description 10
- 239000000377 silicon dioxide Substances 0.000 description 10
- 239000010410 layer Substances 0.000 description 9
- 239000010453 quartz Substances 0.000 description 6
- 239000012792 core layer Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- ONRPGGOGHKMHDT-UHFFFAOYSA-N benzene-1,2-diol;ethane-1,2-diamine Chemical compound NCCN.OC1=CC=CC=C1O ONRPGGOGHKMHDT-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23920384A JPS61117513A (ja) | 1984-11-13 | 1984-11-13 | フアイバ．ガイド付光回路およびその製造方法 |
| CA000486477A CA1255382A (en) | 1984-08-10 | 1985-07-08 | Hybrid optical integrated circuit with alignment guides |
| US06/753,632 US4750799A (en) | 1984-08-10 | 1985-07-10 | Hybrid optical integrated circuit |
| DE8585108730T DE3575208D1 (de) | 1984-08-10 | 1985-07-12 | Optischer, integrierter hybridschaltkreis und verfahren zu seiner herstellung. |
| EP85108730A EP0171615B1 (de) | 1984-08-10 | 1985-07-12 | Optischer, integrierter Hybridschaltkreis und Verfahren zu seiner Herstellung |
| US07/038,127 US4735677A (en) | 1984-08-10 | 1987-04-02 | Method for fabricating hybrid optical integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23920384A JPS61117513A (ja) | 1984-11-13 | 1984-11-13 | フアイバ．ガイド付光回路およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61117513A JPS61117513A (ja) | 1986-06-04 |
| JPS6325644B2 true JPS6325644B2 (de) | 1988-05-26 |
Family
ID=17041262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23920384A Granted JPS61117513A (ja) | 1984-08-10 | 1984-11-13 | フアイバ．ガイド付光回路およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61117513A (de) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6396609A (ja) * | 1986-10-14 | 1988-04-27 | Nec Corp | 光接続回路 |
| US4810049A (en) * | 1987-04-02 | 1989-03-07 | American Telephone And Telegraph Company, At&T Bell Laboratories | Reducing bend and coupling losses in integrated optical waveguides |
| FR2623915B1 (fr) * | 1987-11-26 | 1990-04-13 | Corning Glass Works | Procede de production d'un composant optique integre en verre comprenant des tranchees de positionnement et de fixation de fibres optiques en alignement avec des guides d'ondes et composants ainsi produits |
| JP2893093B2 (ja) * | 1989-02-10 | 1999-05-17 | 日本電信電話株式会社 | ファイバ・ガイド部付き光導波路の製作方法 |
| US5077818A (en) * | 1989-09-29 | 1991-12-31 | Siemens Aktiengesellschaft | Coupling arrangement for optically coupling a fiber to a planar optical waveguide integrated on a substrate |
| DE59003592D1 (de) * | 1989-09-29 | 1994-01-05 | Siemens Ag | Verfahren zur Herstellung eines Körpers aus Silizium. |
| US5299276A (en) * | 1991-10-11 | 1994-03-29 | Fujitsu Limited | Waveguide type optical device and method for manufacturing the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4953453A (de) * | 1972-06-26 | 1974-05-24 |
-
1984
- 1984-11-13 JP JP23920384A patent/JPS61117513A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4953453A (de) * | 1972-06-26 | 1974-05-24 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61117513A (ja) | 1986-06-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |