JPS6325512B2 - - Google Patents

Info

Publication number
JPS6325512B2
JPS6325512B2 JP54172723A JP17272379A JPS6325512B2 JP S6325512 B2 JPS6325512 B2 JP S6325512B2 JP 54172723 A JP54172723 A JP 54172723A JP 17272379 A JP17272379 A JP 17272379A JP S6325512 B2 JPS6325512 B2 JP S6325512B2
Authority
JP
Japan
Prior art keywords
diaphragm
diffusion layer
metal electrode
impurity diffusion
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54172723A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5696875A (en
Inventor
Shoichi Kakimoto
Tooru Kameda
Toshio Sogo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP17272379A priority Critical patent/JPS5696875A/ja
Publication of JPS5696875A publication Critical patent/JPS5696875A/ja
Publication of JPS6325512B2 publication Critical patent/JPS6325512B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure
    • H10W70/681—
    • H10W72/01515—
    • H10W72/075—
    • H10W72/536—
    • H10W72/5363—
    • H10W72/884—

Landscapes

  • Pressure Sensors (AREA)
JP17272379A 1979-12-29 1979-12-29 Semiconductor pressure sensing device and manufacture thereof Granted JPS5696875A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17272379A JPS5696875A (en) 1979-12-29 1979-12-29 Semiconductor pressure sensing device and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17272379A JPS5696875A (en) 1979-12-29 1979-12-29 Semiconductor pressure sensing device and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS5696875A JPS5696875A (en) 1981-08-05
JPS6325512B2 true JPS6325512B2 (enExample) 1988-05-25

Family

ID=15947128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17272379A Granted JPS5696875A (en) 1979-12-29 1979-12-29 Semiconductor pressure sensing device and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS5696875A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5878470A (ja) * 1981-11-04 1983-05-12 Mitsubishi Electric Corp 半導体圧力検出装置
JP4506478B2 (ja) * 2005-01-18 2010-07-21 株式会社デンソー 圧力センサ
JP2013024824A (ja) * 2011-07-26 2013-02-04 Denso Corp センサ装置の製造方法
BR112023002834A2 (pt) * 2020-08-25 2023-03-14 Edwards Lifesciences Corp Embalagem de sensor de pressão implantável

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53103375A (en) * 1977-02-22 1978-09-08 Toshiba Corp Semiconductor device

Also Published As

Publication number Publication date
JPS5696875A (en) 1981-08-05

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