JPS63250177A - Ｍｏｓ電界効果型トランジスタ - Google Patents
Ｍｏｓ電界効果型トランジスタInfo
- Publication number
- JPS63250177A JPS63250177A JP8596287A JP8596287A JPS63250177A JP S63250177 A JPS63250177 A JP S63250177A JP 8596287 A JP8596287 A JP 8596287A JP 8596287 A JP8596287 A JP 8596287A JP S63250177 A JPS63250177 A JP S63250177A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- diffusion layer
- insulating film
- source
- effect transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005669 field effect Effects 0.000 title claims abstract description 20
- 239000000758 substrate Substances 0.000 claims abstract description 57
- 238000009792 diffusion process Methods 0.000 claims abstract description 44
- 230000015556 catabolic process Effects 0.000 abstract description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 238000005468 ion implantation Methods 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 36
- 239000004065 semiconductor Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 241000238557 Decapoda Species 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8596287A JPS63250177A (ja) | 1987-04-07 | 1987-04-07 | Ｍｏｓ電界効果型トランジスタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8596287A JPS63250177A (ja) | 1987-04-07 | 1987-04-07 | Ｍｏｓ電界効果型トランジスタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63250177A true JPS63250177A (ja) | 1988-10-18 |
| JPH0563024B2 JPH0563024B2 (enExample) | 1993-09-09 |
Family
ID=13873364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8596287A Granted JPS63250177A (ja) | 1987-04-07 | 1987-04-07 | Ｍｏｓ電界効果型トランジスタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63250177A (enExample) |
-
1987
- 1987-04-07 JP JP8596287A patent/JPS63250177A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0563024B2 (enExample) | 1993-09-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |