JPS63249005A - Flatness measuring apparatus - Google Patents

Abstract

PURPOSE:To measure the flatness over a long distance or a wide area at one time accurately, by a method wherein light displacement detecting elements measuring the strain of a slide beam are provided additionally to a measuring unit moving along the slide beam. CONSTITUTION:A measuring unit 30 moves along a slide beam 10 at one end of which a laser 20 is provided. A laser beam reflected by a half mirror 70 is reflected by a surface B to be measured and is received and detected by a photodetector array 40, and an arithmetic means 60 calculates the distance between the measuring unit 30 and the surface B which varies in accordance with the flatness. Meanwhile, a laser beam transmitted through the mirror 70 is received by a photodetector array 50, and the means 60 calculates the strain of the beam 10, correcting the calculated distance. Accordingly, an accurate measurement is performed even when the beam is strained when a span is lengthened, and thus the flatness over a long distance or a wide area can be measured at one time accurately.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to a flatness measuring device.

[Prior Art] Conventional flatness measuring devices measure flatness while a measuring part moves along a slide beam, and whether it is a contact type or a non-contact type, the flatness measurement device measures the flatness of about 0, IILm. There are some that can perform measurements with degree of accuracy.

[Problems to be Solved by the Invention] In the L2 conventional device, there is a problem in that the distortion of the bipedal slide beam directly affects the measurement result of flatness. That is, in order to maintain measurement accuracy at a predetermined value, the slide beam cannot be made that long, for example, O
, 17zm, it is necessary to keep the length of the slide beam to about 100s. Therefore, it is reported that the conventional device described above cannot accurately measure the flatness of a long distance or a wide area at once.

[L stage for solving the problem] The present invention installs a laser in a part of this slide beam, makes the measuring section movable along the slide beam,
A first optical displacement detection element installed in the measurement section measures the distance between the object to be measured and the measurement section, a second optical displacement detection element measures the distortion of the slide beam in the measurement section, and the second optical displacement detection element measures the distortion of the slide beam in the measurement section. The output value of the first optical displacement detection element is corrected according to the output value of the second optical displacement detection element.

[Function] In the present invention, a laser is installed in a part of this slide beam, and the measurement section is made movable along the slide beam (1), and is covered by the first optical displacement detection element installed in the measurement section. Measure the distance between the object to be measured and the measurement section, measure the distortion of the slide beam at the measurement section using the second optical displacement detection element, and measure the distortion of the slide beam in the measurement section according to the output value of the l-foot temperature 2 optical displacement detection element. - foot temperature 1 The output value of the optical displacement detection element is corrected.

The distortion of the slide beam does not affect the flatness measurement results, and the flatness of a long distance or a wide area can be accurately measured at once.

[Example] FIG. 1 is a front view showing an embodiment of the present invention.

This embodiment uses a laser 20 at the end of the slide beam lO.
is installed, and the laser beam from this laser 20 is almost parallel to the slide beam lO, and the laser beam emitted from this laser 20 is almost parallel to the slide beam lO.
The measuring unit 30 can move along the Q.

FIG. 2 is a diagram showing details of the measuring section 30 in the above embodiment.

The measurement section 30 includes a half mirror 70, an imaging lens 41, a light receiving element array 40.50, and a calculation means 60.

The light receiving element array 40 is an example of a first optical displacement detection element that measures the distance between the object to be measured B and the measuring section 30, and its output varies depending on the position where the laser beam reflected by the object to be measured B is received. are different.

The light receiving element array 50 is an example of a second optical displacement detecting element that receives the laser light from the laser 20 and measures the strain of the slide beam IO in which the measuring section 30 is located.
The output varies depending on the position where the laser beam from 0 is received.

The calculation means 6G is a means for correcting the output value of the first optical displacement detection element according to the output value of the second optical displacement detection element,
Specifically, the output value of the light receiving element array 40 is corrected according to the output value of the light receiving element array 50.

Next, the operation of the two-legged embodiment will be explained.

To measure the flatness of the object B, first, the measuring device shown in FIG. 1 is placed on the object B 1-. in this case,
The direction of the laser beam from the laser 20 is set to be parallel to the surface of the object to be measured B, and while the III constant part 30 is moving between the left end and the right end of the slide beam 10, the laser beam is received. It is assumed that the element array 50 is always irradiated. Further, the diameter of the light indicated by L is, for example, 3-layer φ.

- In the embodiment described above, the light receiving element array 40 measures the distance between the measurement unit 30 and the object to be measured B, and the light receiving element array 5
0 detects the distortion of the slide beam 10, and the calculation section 60 corrects the distortion.

FIG. 3 is a diagram showing the principle of measuring the distance between the measuring section 30 and the object to be measured B. FIG.

The distance between the measurement i' 1130 and the object to be measured B is relative, and even if the position of the measuring section 30 is fixed and the position of the object to be measured B is moved, the result will be the same. After this thought,
When the object to be measured is moved to position A, position B, and position C, the beam spot is imaged at positions a, b, and c in the light receiving element array 40 via the condenser lens 41. In other words,
The position of the beam spot on the light-receiving element array 40 varies depending on the distance between the measurement unit 30 and the object to be measured B. Therefore, based on the position of the beam spot on the light-receiving element array 40, the measurement! The distance between '1130 and the object to be measured B can be determined.

On the other hand, since the light-receiving element array 50 is fixed to the frame of the measuring section 30, when the slide beam 10 is curved upward in the figure, the measuring section 30 moves further to L than the object to be measured B. receives the laser beam at the lower part of the light receiving element array 50,
Conversely, when the slide beam IO is curved downward in the figure, the measuring object P130 approaches the object to be measured B and receives the laser beam at the L portion of the light receiving element array 50. For this reason, the output value of the light receiving element array 40 can be corrected according to the output of the light receiving element array 50.

Calculation for correcting the flatness output by the light receiving element array 40 based on the output of the light receiving element array 50 is carried out by the calculation stage 60.
is executed. Therefore, distortion (curvature) of the slide beam 10 can be detected reliably.

Further, the laser beam from the laser 20 is transmitted to the nauf mirror 7.
The laser beam is divided into two parts by 0, one of which advances to the light receiving element area 50, and the remaining laser beam is reflected by the object to be measured B and advances to the light receiving element area 40. In this case, "-leg light receiving element The light sources of the laser light traveling to the arrays 40 and 50 may be independent of each other, and two light sources may be provided.

FIG. 4 is a plan view showing another embodiment of the present invention.

This embodiment is an example of an apparatus for measuring flatness two-dimensionally, and the slide beam IO, laser 20, and measuring section 30 are the same as those shown in FIG. 1.2.

However, the slide beam 10 is not fixed, but is supported by the measuring section 30a and the slider 30b.
The measuring section 30a and the slider 30b move along the slide beam loa and the slide beam 10b, respectively. Furthermore, the measuring section 30a includes:
It has only the one corresponding to the light receiving element array 50, and the output signal of the one corresponding to the light receiving element array 50 is used to correct the flatness measurement result (output of the calculation means 60 in the measuring section 30). It is something to do. Regarding what corresponds to the above-mentioned light receiving element array 50.

A laser 20a supplies laser light.

Note that the slider 30b is a normal slider. In this way, by moving the measuring unit 30 along the slide beam 10 and moving the slide beam 10 along the slide beams 10a and 10b, the flatness of the object to be measured can be measured two-dimensionally. Can be done.

[Effects of the Invention] According to the present invention, ``the distortion of the slide beam does not affect the flatness measurement results, and the flatness of a long distance or a wide area can be measured accurately at once. have an effect.

[Brief explanation of drawings]

FIG. 1 is a front view showing one embodiment of the present FFI II. FIG. 2 is a diagram showing in detail the measuring section in the embodiment shown in FIG. 1. FIG. 3 is a diagram showing the principle of measuring the distance between the measuring section and the object to be measured. FIG. 4 is a plan view showing another embodiment of the present invention. 10, lOa, lOb - slide beam, 20.20
a... Laser. 30.30a...Measurement part. 40.50... Light receiving element array, 60... Calculating means, 70... Half mirror 0 Patent applicant: Japan Sensor Cooperation Co., Ltd. Agent Arata Yokubo - Figure 1 Figure 2 Figure 4 figure

Claims (2)

[Claims] (1) A slide beam; A laser installed in a part of this slide beam; A measurement section that moves along the slide beam; A distance between the object to be measured and the measurement section installed in the measurement section; a first optical displacement detection element that measures; a second optical displacement detection element that receives laser light from the laser and measures the distortion of the slide beam in the measurement section; an output value of the second optical displacement detection element; A flatness measuring device comprising: arithmetic means for correcting the output value of the first optical displacement detection element according to; (2) In claim 1, the measurement unit includes a half mirror, and the half mirror transmits the laser beam from the laser to the first optical displacement detection element and the second optical displacement detection element. A flatness measuring device characterized in that it is divided into an element.