JPS5847209A - Device for measuring surface configuration - Google Patents
Device for measuring surface configurationInfo
- Publication number
- JPS5847209A JPS5847209A JP14489181A JP14489181A JPS5847209A JP S5847209 A JPS5847209 A JP S5847209A JP 14489181 A JP14489181 A JP 14489181A JP 14489181 A JP14489181 A JP 14489181A JP S5847209 A JPS5847209 A JP S5847209A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- moving table
- optical sensor
- output
- movement amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は光センサを用いて被測定物の表面形状を広い面
積にわたって、高速、高精度に測定できるJ:うにした
表面形状測定装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a surface profile measuring device capable of measuring the surface profile of a workpiece over a wide area at high speed and with high precision using an optical sensor.
被測定物の表面形状(表面の凹凸)を測定する方法とし
て、従来では、被測定物表面に■1の先端を接触させて
、釦又は被測定物を移動させる触11方が用いられてい
る。しかし、この方法では、(イ)接触式であるので表
面を走査する速度を大きくできず測定に時間がかかる。Conventionally, as a method of measuring the surface shape (surface irregularities) of the object to be measured, a method is used in which the tip of (1) is brought into contact with the surface of the object to be measured and the button or the object to be measured is moved. . However, in this method, (a) since it is a contact method, it is not possible to increase the speed at which the surface is scanned, and the measurement takes time.
(ロ)被測定物に傷をつ【ノるおそれがある。(b) There is a risk of damaging the object to be measured.
(ハ)被測定物表面に段差があると走査が困難である。(c) Scanning is difficult if there are steps on the surface of the object to be measured.
などの欠点があった。There were drawbacks such as.
また、被測定物表面にシリコンウェハや平面ガラスをの
せて、被測定物表面に歪みがある場合に生ずる干渉縞に
よって測定1−る王渉法も用いられている。しかし、こ
の方i人では、
(イ)被測定物の表面の粗面の場合には測定が困難で、
測定前に表面を鏡面となるように磨かなければならない
。Another method is also used, in which a silicon wafer or flat glass is placed on the surface of the object to be measured and measurements are made using interference fringes that occur when the surface of the object is distorted. However, in this case, it is difficult for one person to measure (a) the surface of the object to be measured is rough;
The surface must be polished to a mirror surface before measurement.
(ロ)波長程度からその数十倍までの変位は測定できる
が、それ以上番ま縞の間隔が狭くなり実用的ではない。(b) Displacements from about the wavelength to several tens of times that wavelength can be measured, but the spacing between the stripes becomes narrower than that, making it impractical.
(ハ)広い面積にわたって測定することがt11シい。(c) It is difficult to measure over a wide area.
などの欠点があった。There were drawbacks such as.
本発明は上記の欠点を改め、非接触式に、高速、高精度
に、広い面積にわたって、また粗面であっても段差があ
っても、測定できるJ:うにした表面形状測定装置を提
供することを目的としている。The present invention corrects the above-mentioned drawbacks and provides a surface shape measuring device that can measure a wide area non-contactly, at high speed, with high precision, even on rough surfaces or with steps. The purpose is to
以下、図面に基いて本発明の一実施例を説明J”る。An embodiment of the present invention will be described below based on the drawings.
第1図は本発明の一実施例にJ、る表面形状測定装置を
示している。FIG. 1 shows a surface profile measuring device according to an embodiment of the present invention.
同図において、1は被atll定物Wを据えイ・目プる
平板状の基台であって、この基台1は、X方向移動デー
プル2上を水平方向(X軸り向)にパルスモータ3によ
って移動可能になっており、このX方向移動テーブル2
はX方向と直交JるY方向移動テ=3−
一ブル4上を鉛直方向くY軸方向)にパルスモータ5に
よって移動可能に(1つている。これらの基台1、X方
向移動テーブル2、Y方向移動テーブル4は鉛直に設置
されているため、被測定物Wは基台1の表面に鉛直状態
で据えtIUられる。In the same figure, reference numeral 1 denotes a flat base on which a fixed object W is placed, and this base 1 moves pulses in the horizontal direction (along the This X-direction moving table 2 is movable by a motor 3.
is movable in the Y-direction perpendicular to the X-direction by a pulse motor 5 in the vertical direction and the Y-axis direction on the table 4. Since the Y-direction moving table 4 is installed vertically, the object W to be measured is placed vertically on the surface of the base 1.
基台1の前方には光センサ−6が固定台7上に固定設置
されている。In front of the base 1, an optical sensor 6 is fixedly installed on a fixed base 7.
光センサ6は、第2図に示tJ:うに、指向性の良い光
束ビームを発する光源61と、この光束を絞って被測定
物Wの表面に照射する前側し〕/ズ62と、光軸が照射
レンズ62の光軸か、らある角度でずれ、被測定物Wの
表面の光点からの反射光束を絞って受光素子64の受光
部64 aに反射光点の像を結像さける結像レンズ63
ど、反射光点が被測定物Wの表面の7方向(X−Y平面
に直交する方向)の変位によって変化りる場合の軌跡に
受光部64.8が一致するにうに配置され、受光部6/
Iaにお(プる反射光点の像の位置に応じた二つの信号
11、iユを出力する受光素子64と、受光素子64の
二つの出力 i、 i、ntら被測定物Wの表面の4
−
高さの変化71を
として演輝する演算器65とにJ一つで構成されている
。The optical sensor 6, shown in FIG. 2, includes a light source 61 that emits a beam of light with good directionality, a front lens 62 that focuses this light beam and irradiates it onto the surface of the object W to be measured, and an optical axis. is shifted at a certain angle from the optical axis of the irradiation lens 62, and focuses the reflected light beam from the light spot on the surface of the object W to be measured to form an image of the reflected light spot on the light receiving portion 64a of the light receiving element 64. Image lens 63
The light receiving section 64.8 is arranged so as to match the trajectory when the reflected light spot changes depending on the displacement of the surface of the object W in seven directions (directions perpendicular to the X-Y plane). 6/
A light-receiving element 64 outputs two signals 11 and i according to the position of the image of the reflected light spot on Ia, and two outputs of the light-receiving element 64 i, i, nt, etc. on the surface of the object W to be measured 4
- The arithmetic unit 65 that performs the height change 71 is composed of one J.
第3図に示すように、被測定物Wの表面に7方向(X−
Y平面に直交する方向)の変位(即ち表面の凹凸)が存
在すると、黒用レンズ62からの光束が表面で反射され
、結像レンズ63によって結像される反射光点の像Qは
Z方向の変位に対応してZ方向に変位する。この7方向
の反射光点σ゛像Qの変位を検出するために、前記した
ように、受光素子64の受光部64 aはZ方向に叩
lう、反射光点の像Qの軸跡に一致ざUである。As shown in FIG. 3, the surface of the object W to be measured is
If there is a displacement (in a direction perpendicular to the Y plane) (that is, unevenness on the surface), the light beam from the black lens 62 will be reflected on the surface, and the image Q of the reflected light point formed by the imaging lens 63 will be in the Z direction. It is displaced in the Z direction corresponding to the displacement of . In order to detect the displacement of the image Q of the reflected light spot σ in these seven directions, the light receiving part 64a of the light receiving element 64 is moved in the Z direction to the axis trace of the image Q of the reflected light spot, as described above. It is a coincidence.
受光素子64としては、例えば第4図に示−!J−J:
うに、Z方向の変位を電気信号に変換する一次元の拡散
型PINダイオードが用いられる。この受光素子64は
7方向の両端に設【プた端子64b164 Cにそれぞ
れ接続した口筒1氏抗器R,Rに流れる受光電流 11
、12の比が、反射光点の像Qの7方向の位置変化に応
じて変化するもので、中心線1゜から光点のFj+Qの
7方向の一距離Z、はむ1−仁、
Z、−に■(1,t、(但L K I Lj定vi)と
して求められる。For example, the light receiving element 64 is shown in FIG. J-J:
In other words, a one-dimensional diffused PIN diode is used that converts displacement in the Z direction into an electrical signal. This light-receiving element 64 has a light-receiving current flowing through resistors R and R connected to terminals 64b and 164C provided at both ends in seven directions.
, 12 changes according to the change in the position of the image Q of the reflected light spot in the 7 directions, and the distance Z in the 7 directions of the light spot Fj + Q from the center line 1°, Ham 1 - Jin, Z, − is obtained as ■(1, t, (L K I Lj constant vi).
X方向移動テーブル2、Y方向移動テーブル4ににるX
方向、Y方向の各移動ff1X、Yは、それぞれパルス
モータ3.5を駆動するXドライバ8、Yドライバ9の
駆動出力を受領するX方向移動量検出器10XY方向移
動狙検出器11にJ:つて検出される。X on the X-direction moving table 2 and the Y-direction moving table 4
Each movement in the direction and Y direction ff1X, Y is determined by an X direction movement amount detector 10 which receives the drive outputs of an X driver 8 and a Y driver 9 which respectively drive a pulse motor 3.5, and an XY direction movement aim detector 11 J: detected.
48号処理器12は、前記光セン1す6の演算器65の
出カフ1と、lliに、前記X方向移動量検出器10、
Y方向移動検出器11の出力X、Yを受領して被測定物
Wの表面形状を演n出力づる機能、Xドライバ8、Yド
ライバ9を制御する制御信号を出力する機能、被測定物
Wの表面の三点の7方向の高さを光セン9″6の出力に
よって記憶し、この三点の7方向の高さが等しい値とな
るように被測定物Wを仮想的に置ぎ挽えた場合の他の任
意の点の7方向高さを出力するように補正する機能、Z
方向の高さから7方向の等高線の位置を出力する機能を
備えている。Processor No. 48 12 connects the output cuff 1 of the arithmetic unit 65 of the optical sensor 16 to the X-direction movement amount detector 10,
A function of receiving the outputs X and Y of the Y-direction movement detector 11 and outputting the surface shape of the object to be measured W, a function of outputting a control signal for controlling the X driver 8 and Y driver 9, and a function of outputting a control signal for controlling the X driver 8 and the Y driver 9. The heights of the three points on the surface of Z
It has a function to output the position of contour lines in 7 directions based on the height of the direction.
上記の如く表面形状測定装置は構成されているので、被
測定物Wを基台1上に据え付け、X方向移動テーブル2
及びY方向移動テーブル4によって基台1をX−Y平面
で移動しつつ光セン(J−6の光源61の光ビームを被
測定物Wの表面に照射する。受光素子64からは信qi
1、 iユが出力され、演算器65は信号 ii、il
受領して被測定物Wの光セン号6の出力Z1及びX、Y
方向移動量検出器10.11からのX、、Yニア’j向
の移動量X、Yは信号処理器12へ出力される。Since the surface shape measuring device is configured as described above, the object to be measured W is installed on the base 1, and the X-direction moving table 2
While moving the base 1 in the X-Y plane using the Y-direction moving table 4, a light beam from a light source 61 of a photosensor (J-6) is irradiated onto the surface of the object W to be measured.
1, iU is output, and the arithmetic unit 65 outputs signals ii, il
Outputs Z1, X, and Y of the optical sensor 6 of the object to be measured W upon receiving the
The amount of movement X, Y in the near 'j direction from the direction movement amount detector 10.11 is output to the signal processor 12.
信号処理器12は光センサ6ににる変位量71とX、Y
方向移動量X、Yを取込んで、被測定物Wの表面形状を
演算して出力する。The signal processor 12 calculates the amount of displacement 71 appearing on the optical sensor 6 and X, Y.
The directional movement amounts X and Y are taken in, and the surface shape of the object W to be measured is calculated and output.
第5図は前記光センサ6が7方向移動テーブル13上を
モータ14によってX−Y平面と直交するZ軸方向に移
動可能に設置された場合を示している。このZ方向移動
テーブル13にj;る光センサ6の7方向移動12は周
波数安定化されていな7−
いHe−N f!レーザを使用した光セン1す6の移
動を検出する干渉測長器から成るZ方向移動系検出器1
5によって行われる。FIG. 5 shows a case where the optical sensor 6 is installed on a seven-direction moving table 13 so as to be movable in the Z-axis direction perpendicular to the X-Y plane by a motor 14. The 7-direction movement 12 of the optical sensor 6 on this Z-direction movement table 13 is caused by the frequency not being stabilized. Z-direction moving system detector 1 consisting of an interferometric length measuring device that detects the movement of optical sensors 1 and 6 using a laser
5.
第6図は、第5図に示した如く光センサ6を7方向にも
移動できるようにした場合の表面形状油筒ための構成を
示している。FIG. 6 shows a structure for a surface-shaped oil cylinder in which the optical sensor 6 can be moved in seven directions as shown in FIG.
即ら、信号処理器12は、前記光センサ6の演算器65
の出力Z1と7方向移動間検出器15の出力Zとを加算
して被測定物Wの表面の7方向の高さを演算するとJt
に、前記X方向移動量検出器10、Y方向移i!IIm
検出器11の出力X1Yを受領して被測定物Wの表面形
状を演算出力する機能、Xドライバ8、Yドライバ9の
他に1:−914を駆!IJするZドライバ16を制御
する制御信号を出力する機能、X方向移動テーブル2、
Y方向移動テーブル4の移動に伴って生ずるZ方向のず
れ量(蛇行)72を知るために、予めAプテイカルフラ
ットのような平面疫の良い被測定物を光センサ6によっ
て測定記憶し、前記加締器からの被測定物Wの表面の7
方向の高さを補正する機Oし、被測定8−
物Wの表面の3点の7方向の高さを光センサ6の出力に
よって記憶し、この3点の7方向の高さが等しい値とな
るように被測定物Wを仮想的に置き替えた場合の他の任
意の点の7方向の高さを出力するように補正する機能、
Z方向の高さから7方向の等高線の位置を出力する機能
を備えている。That is, the signal processor 12 is the arithmetic unit 65 of the optical sensor 6.
The height of the surface of the object W in the seven directions is calculated by adding the output Z1 of the detector 15 and the output Z of the seven-direction movement detector 15.
, the X-direction movement amount detector 10 and the Y-direction movement i! IIm
In addition to the function of receiving the output X1Y of the detector 11 and calculating and outputting the surface shape of the object W to be measured, the X driver 8 and the Y driver 9 also drive 1:-914! A function of outputting a control signal to control the Z driver 16 for IJ, an X direction movement table 2,
In order to know the Z-direction deviation amount (meandering) 72 that occurs as the Y-direction moving table 4 moves, an object to be measured with good flatness, such as an A-dimensional flat, is measured and stored in advance by the optical sensor 6, and the 7 of the surface of the object W to be measured from the caulking device
A device for correcting heights in directions is used to store the heights in seven directions at three points on the surface of the object W to be measured by the output of the optical sensor 6, and calculate the value in which the heights in seven directions at these three points are equal. A function to correct so as to output the height of any other arbitrary point in seven directions when the measured object W is virtually replaced so that
It has a function to output the positions of contour lines in seven directions from the height in the Z direction.
また、光センサ6のある時点での出ツノを配憶し、この
記憶した値と光センサ6の出力値とを比較して両者がほ
ぼ一致するにうに7方向移動テーブル13のモータ14
を7ドライバ16にJ、って駆動して光センサ6の7方
向(C/置を制御する機能を備えていて、光センサ6の
出力を常にほぼ一定値になるように制御して被測定物W
の7方向の高さを光センサ6の出力と干渉測長器からな
る7方向移動量検出器15の出力との和によって求め、
広い範囲にわたって精密に測定さ「得るようになってい
る。Further, the output point of the optical sensor 6 at a certain point in time is stored, and the stored value is compared with the output value of the optical sensor 6, and the motor 14 of the seven-direction moving table 13 is determined so that the output value of the optical sensor 6 almost matches.
It is equipped with a function to control the seven directions (C/position) of the optical sensor 6 by driving the optical sensor 6 to the 7 driver 16, and controls the output of the optical sensor 6 so that it is always at a nearly constant value. Things W
The heights in seven directions are determined by the sum of the output of the optical sensor 6 and the output of the seven-direction movement amount detector 15 consisting of an interferometric length measuring device,
It is now possible to obtain precise measurements over a wide range.
従って、第5.6図に示した表面形状測定装置では、信
号処理器12によって光セン96の出力7tが受領され
、この値が常にほぼ一定値となるように〈即ら受光素子
6/lの受光面64aの中心線I近傍に反射光点のWi
t Qが結像ターるように)、7ドライバ16によって
モータ14が駆動されてZ方面移動テーブル13上を光
[ン4J−6tJ、 1方向に移動される。光レンリ゛
6の7方向の移動用は干渉測長器から成る7方向移動I
δ検出器15で検出される。Therefore, in the surface profile measuring apparatus shown in FIG. There is a reflected light point Wi near the center line I of the light receiving surface 64a of
The motor 14 is driven by the 7 driver 16 so that the light beam is moved in one direction on the Z-direction moving table 13 so that the image is formed. For the movement of the optical beam 6 in 7 directions, a 7-direction movement I consisting of an interferometric length measuring device is used.
It is detected by the δ detector 15.
X、Y、Z方向移動量検出器10.11.15によって
、′ぞれぞれx、y、Z方向の移動IX。The X, Y, and Z direction movement amount detectors 10.11.15 detect the movement IX in the x, y, and Z directions, respectively.
Y、Zが信号処理器12へ出力される。Y and Z are output to the signal processor 12.
信号処理器12は、光センサ6による変位量71と7方
向移動量検出器13による7方向移動吊7とを加算し、
X、Y方向移動ax、yを取込んで被測定物Wの表面形
状を演算して出力する。The signal processor 12 adds the displacement amount 71 determined by the optical sensor 6 and the seven-direction movement suspension 7 determined by the seven-direction movement amount detector 13,
The X and Y direction movements ax and y are taken in, and the surface shape of the object W to be measured is calculated and output.
なお、基台1に被測定物Wを据え伺(プるhftに、光
セン1〕6の光ビームをAプティカルフラッ1〜のよう
な平面度の良い物体の表面に照射することによって、予
めX方向移動テーブル2、Y方向移動テーブル4の7方
向のずれ量を光センサ6の出力として信号処理器12に
記憶し、前記7、と7とを加算した値からこのずれ吊を
補正するにうにすれば、X方向移動テーブル2、Y方向
移動テーブル4に蛇行があっても無関係に正しい測定値
が得られる。In addition, by placing the object W to be measured on the base 1 and irradiating the light beam of the optical sensor 1 6 onto the surface of an object with good flatness, such as the A optical flat 1, The amount of deviation in seven directions of the X-direction moving table 2 and the Y-direction moving table 4 is stored in advance in the signal processor 12 as the output of the optical sensor 6, and this deviation is corrected from the value obtained by adding the above-mentioned values 7 and 7. By doing so, correct measurement values can be obtained regardless of meandering in the X-direction moving table 2 and the Y-direction moving table 4.
また、被測定物Wの表面がX −Y平面に対して傾斜し
た平面の場合には、信号処理器12で被測定物Wの表面
の三点の7方向の^ざを光レンリ6の出力によって記憶
し、この三点の7方向の高さが等しい値となるように被
測定物Wを仮想的に首き換えた場合の、他の任意の点の
7方向高さを出力するように補正することもできる。In addition, when the surface of the object W to be measured is a plane inclined with respect to the When the measured object W is virtually turned so that the heights of these three points in seven directions become the same value, the height of any other arbitrary point in seven directions is output. It can also be corrected.
なお、Z方向の高さから7方向の等高線の位置を出力づ
ることもできる。Note that the positions of contour lines in seven directions can also be output from the height in the Z direction.
、本発明の表面形状測定装置にJ、れぽ、(イ)被接触
式であるので高速走査が行え、高速測定ができる。また
粗面でも測定できる。(a) Since the surface profile measuring device of the present invention is of a non-contact type, it can perform high-speed scanning and high-speed measurement. It can also be measured on rough surfaces.
(ロ)X方向移動テーブル、Y方向移動テーブルによっ
てX−Y平面を任意に被測定物を移動できるので、広い
面積にわたって測定できる。(b) Since the object to be measured can be moved arbitrarily on the X-Y plane using the X-direction moving table and the Y-direction moving table, measurement can be performed over a wide area.
=11−
(ハ)Z方向移動テーブルによって光センサを移動でき
るので7方向の変位が大きい場合でも高精疫の測定がで
きる。=11- (c) Since the optical sensor can be moved by the Z-direction moving table, high-definition measurements can be made even when the displacement in seven directions is large.
第1図は本発明の一実施例の表面形状測定装置の機構部
を示す斜視図、第2図はその回路部のブロック図、第3
図は光セン9−にj;る測定原即を示す図、第4図は受
光素子の一例を示ず説明図であ動テーブル、3・・・・
・・パルスモータ、4・・・・・・Y方向移動テーブル
、5・・・・・・パルスモータ、6・・・・・・光セン
9”、10・・・・・・X方向移動量検出器、11・・
・・・・Y方向移動171検出器、12・・・・・・信
号処理器、13・・・・・・Z方向移動テーブル、15
・・・・・・Z方向移動邑検出器、16・・・・・・7
ドライバ、61・・・・・・光源、64・・・・・・受
光素子、65・・・・・・演算器。
特許出願人 安立電気株式会社
12−FIG. 1 is a perspective view showing a mechanical section of a surface profile measuring device according to an embodiment of the present invention, FIG. 2 is a block diagram of its circuit section, and FIG.
The figure shows the measurement source for the optical sensor 9-, and FIG. 4 is an explanatory diagram without showing an example of the light-receiving element.
...Pulse motor, 4...Y direction movement table, 5...Pulse motor, 6...Light sensor 9", 10...X direction movement amount Detector, 11...
... Y direction movement 171 detector, 12 ... signal processor, 13 ... Z direction movement table, 15
...Z-direction moving detector, 16...7
Driver, 61... Light source, 64... Light receiving element, 65... Arithmetic unit. Patent applicant Anritsu Electric Co., Ltd. 12-
Claims (3)
ルど:前記X方向移動テーブルの移動量Xを検出するX
方向移動量検出器と;被測定物を前記X方向ど直交する
Y方向に移動させるY方向移動デープルど:前記Y方向
移動テーブルの移動量Yを検出するY方向移り3M検出
器と;被測定物表面に光ビームを照射し、での反射光点
の位置変化を検出することによってX−Y平面と直交す
るZ方向の被測定物表面までの距離変化量Z1を出力す
る光センリ−と;前記光センサの出力z1及び前記X方
向移動量検出器、Y方向移動量検出器の出力X1Yを受
領して被測定物の表面形状を演算出力する信号処理器と
を備えた表面形状測定装置。(1) An X-direction moving table that moves the object to be measured in the X-direction: X that detects the amount of movement X of the X-direction moving table.
a directional movement amount detector; a Y-direction moving table for moving the object to be measured in a Y direction perpendicular to the X direction; a Y-direction moving 3M detector for detecting the movement amount Y of the Y-direction moving table; an optical sensor that outputs a distance change Z1 to the surface of the object to be measured in the Z direction perpendicular to the X-Y plane by irradiating the object surface with a light beam and detecting the position change of the reflected light point; A surface shape measuring device comprising: a signal processor that receives the output z1 of the optical sensor and the outputs X1Y of the X-direction movement amount detector and the Y-direction movement amount detector, and calculates and outputs the surface shape of the object to be measured.
ルと:前記X方向移動テーブルの移動量X−oA を検出するX方向移動量検出器と;被測定・物を前記X
方向と直交するY方向に移動さUるY方向移動テーブル
と;前記Y方向移動テーブルの移動■Yを検出するY方
向移動量検出器ど;被測定物表面に光ビームを照射し、
その反射光点の((/ hfl変化を検出することによ
ってX−Y平面と直交するZ方向の被測定物表面までの
距11111変化fiiZ1を出力する光センサと;前
記光セン−すを7方向に移動させる7方向移動デープル
と;前記Z方向移動テーブルの移動量Zを検出するZ方
向移動量検出器と:前記光センサの出力Z1と7方向移
動聞検出器の出力Zとを加締してZ方向の被測定物表面
の高さの変化を算出すると共に、前記X方向移動量検出
器及びY方向移動量検出器の出力X1Yを受領して被測
定物の表面形状を演算出力する信号処理器どを備えた表
面形状測定装置。(2) an X-direction moving table that moves the object to be measured in the X direction; an X-direction movement amount detector that detects the amount of movement X-oA of the X-direction moving table;
a Y-direction moving table that moves in the Y direction perpendicular to the Y direction; a Y-direction movement amount detector that detects the movement of the Y-direction moving table;
an optical sensor that outputs a distance 11111 change fiiZ1 to the surface of the object to be measured in the Z direction orthogonal to the X-Y plane by detecting the (/ hfl change of the reflected light point; a 7-direction moving table to be moved; a Z-direction movement amount detector for detecting the movement amount Z of the Z-direction movement table; and an output Z1 of the optical sensor and an output Z of the 7-direction movement detector. a signal that calculates a change in height of the surface of the object to be measured in the Z direction, receives the outputs X1Y of the X-direction movement amount detector and the Y-direction movement amount detector, and calculates and outputs the surface shape of the object to be measured. Surface shape measuring device equipped with processing equipment.
うに、前記Z方向移動テーブルによって光センサを移動
させるようにした特許請求の範囲第2項記載の表面形状
測定装置。 2−(3) The surface shape measuring device according to claim 2, wherein the optical sensor is moved by the Z-direction moving table so that the output cuff 1 of the optical sensor particles always has a constant value. 2-
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14489181A JPS5847209A (en) | 1981-09-15 | 1981-09-15 | Device for measuring surface configuration |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14489181A JPS5847209A (en) | 1981-09-15 | 1981-09-15 | Device for measuring surface configuration |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63246450A Division JPH0726824B2 (en) | 1988-09-30 | 1988-09-30 | Surface shape measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5847209A true JPS5847209A (en) | 1983-03-18 |
JPH0123041B2 JPH0123041B2 (en) | 1989-04-28 |
Family
ID=15372750
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14489181A Granted JPS5847209A (en) | 1981-09-15 | 1981-09-15 | Device for measuring surface configuration |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5847209A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60200109A (en) * | 1984-03-24 | 1985-10-09 | Kanto Jidosha Kogyo Kk | Automatic measurement of three-dimensional shape |
JPS62235511A (en) * | 1986-03-11 | 1987-10-15 | Kobe Steel Ltd | Surface condition inspecting apparatus |
JPS63163107A (en) * | 1986-12-25 | 1988-07-06 | Toshiba Corp | Non-contact type straightness measuring apparatus |
JPS63191011A (en) * | 1987-02-03 | 1988-08-08 | Mitsubishi Metal Corp | Optical surface roughness measuring apparatus |
JPH01199103A (en) * | 1987-03-13 | 1989-08-10 | Canon Inc | Apparatus for measuring surface shape |
JPH03259704A (en) * | 1989-10-20 | 1991-11-19 | Toyota Central Res & Dev Lab Inc | Three-dimensional shape measuring instrument |
JPH03264804A (en) * | 1990-03-15 | 1991-11-26 | Anritsu Corp | Surface-shape measuring apparatus |
JPH03269308A (en) * | 1990-03-20 | 1991-11-29 | Anritsu Corp | Shape measuring instrument |
JP2002365026A (en) * | 2001-06-07 | 2002-12-18 | Sigma Technos Kk | Substrate inspection apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51124944A (en) * | 1975-04-25 | 1976-10-30 | Nippon Kogaku Kk <Nikon> | Device to detect a tangent line of contour line on a three dimentional object |
-
1981
- 1981-09-15 JP JP14489181A patent/JPS5847209A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51124944A (en) * | 1975-04-25 | 1976-10-30 | Nippon Kogaku Kk <Nikon> | Device to detect a tangent line of contour line on a three dimentional object |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60200109A (en) * | 1984-03-24 | 1985-10-09 | Kanto Jidosha Kogyo Kk | Automatic measurement of three-dimensional shape |
JPS62235511A (en) * | 1986-03-11 | 1987-10-15 | Kobe Steel Ltd | Surface condition inspecting apparatus |
JPS63163107A (en) * | 1986-12-25 | 1988-07-06 | Toshiba Corp | Non-contact type straightness measuring apparatus |
JPS63191011A (en) * | 1987-02-03 | 1988-08-08 | Mitsubishi Metal Corp | Optical surface roughness measuring apparatus |
JPH01199103A (en) * | 1987-03-13 | 1989-08-10 | Canon Inc | Apparatus for measuring surface shape |
JPH03259704A (en) * | 1989-10-20 | 1991-11-19 | Toyota Central Res & Dev Lab Inc | Three-dimensional shape measuring instrument |
JPH03264804A (en) * | 1990-03-15 | 1991-11-26 | Anritsu Corp | Surface-shape measuring apparatus |
JPH03269308A (en) * | 1990-03-20 | 1991-11-29 | Anritsu Corp | Shape measuring instrument |
JP2002365026A (en) * | 2001-06-07 | 2002-12-18 | Sigma Technos Kk | Substrate inspection apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH0123041B2 (en) | 1989-04-28 |
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