JPH0476410A - Optical type configuration measuring device - Google Patents

Abstract

PURPOSE:To accurately measure the configuration of a body to be measured by providing plural marks, detectable with an optical sensor, on the given center axis of the body to be measured, and calculating the center axis of the body to be measured from measured data when a configuration is measured. CONSTITUTION:Optical sensors 1 (1a and 1b) are moved in a X axis direction in the upper and lower sides of a body 5 to be measured with a movement mechanism 2, a distance variation between the sensors 1 and the body 5 to be measured is measured at fixed intervals in the X axis direction with the sensors 1, and measured data are operated in first operation parts 7a and 7b. At that time, when the sensors 1 reach on plural marks 12 provided on the body 5 to be measured, the thickness part of the marks 12 is added to a distance variation part between the sensors 1 and the body 5 to be measured, and the positions of the marks 12 are confirmed from the variation part. When measuring in the X axis direction is finished, the sensors 1 are moved by a fixed value in a Y axis direction with a movement mechanism 3, and the X axis direction is measured again. Thus the measuring is made over the whole surfaces of the body 5 to be measured, then measured data are operated in a second operation part 11A, and the configuration of the body 5 to be measured is calculated.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an optical shape measuring device that non-contactly measures the shape of an object using an optical sensor.

[Conventional Technique IfX] Conventionally, as this type of technique, there is, for example, a laser displacement meter described in "How to Use Process Sensors in Practical Examples" published by Kogyo Gijutsu Sha, 1981, Measurement, Separate Volume (page 280).

This will be explained with reference to FIG.

FIG. 3 is a schematic configuration diagram showing a conventional device. As shown in FIG. 1 calculation unit) 7 and a movement mechanism for moving the optical sensor 1 in the X-axis and Y-axis directions parallel to the upper and lower surfaces of the object to be measured 5 (only the configuration on the upper surface side is shown in FIG. 3). 2, 3 and
The display unit 7 is configured to include a calculation section (second calculation section) 11 connected to the display unit 7 via a wiring 8.

Next, the operation will be explained. When the object to be measured 5 whose shape is to be measured is positioned with respect to the optical sensor 1 as shown in FIG. It is detected by the optical sensor 1.

Since the detection point of the reflected light 16 detected by the optical sensor 1 changes depending on the distance between the optical sensor 1 and the object to be measured 5, the optical sensor 1 converts the amount of change into an electrical signal, and the display unit 7 converts the amount of change into an electrical signal. The distance La between the optical sensor 1 and the object to be measured 5 is detected.

Then, by performing measurement while moving the optical sensor 1 in the X-axis and Y-axis directions parallel to the upper and lower surfaces of the object to be measured 5 using the moving mechanisms 2 and 3, changes in the surface shape of the object to be measured 5 can be prevented. This appears as a distance fluctuation between the optical sensor 1 and the object to be measured 5, and the calculation unit 11 calculates the distance fluctuation based on the distance fluctuation data.
The shape of the object to be measured 5 is calculated.

[Problems to be Solved by the Invention] However, the direction of the central axis of the moving mechanism 2.3 that moves the optical sensor 1 in the X-axis and Y-axis directions parallel to the upper and lower surfaces of the object to be measured 5 is in the direction of movement of the optical sensor 1. If there is a deviation between the center axis direction of the measuring device and the center axis direction of the object to be measured 5 when the object to be measured 5 is installed, the moving mechanisms 2 and 3
The measurement axis direction is measured as the axial direction of the object to be measured 5, and this results in an error in measuring the shape of the object to be measured.

In particular, because the object to be measured 5 is large and its shape is not symmetrical with respect to the central axis direction, the direction of the central axis of the object to be measured 5 cannot be determined only by the measurement axis direction of the measuring device. When the shape of the object to be measured 5 is calculated by the calculation section 11 based on the calculation result from the spray unit 7, shape errors and dimension errors are inevitably caused due to the misalignment between the central axis of the measuring device and the central axis of the object to be measured 5. Shape calculation errors such as calculation errors occur.

This invention was made to solve the above-mentioned problems, and even if the central axis of the object to be measured and the axial direction of the moving mechanism do not strictly match, it is possible to correct the axis deviation during shape calculation.
An object of the present invention is to obtain an optical shape measuring device that can perform highly accurate shape measurement over the entire surface of a measured object.

[Means for Solving the Problems] The optical shape measuring device according to the present invention includes: (1) When measuring the shape of an object to be measured, a plurality of marks that can be detected by an optical sensor are placed on a predetermined central axis direction of the object to be measured; ■When converting the shape of the object to be measured in the second calculation section, the shape of the object to be measured is calculated using the line connecting the centers of the plurality of marks as the predetermined central axis direction of the object to be measured. This is calculated based on the amount of displacement from one calculation unit.

[Function] In the optical shape measuring device of the present invention, a plurality of marks that can be detected by an optical sensor are arranged on a predetermined central axis direction of the object to be measured, and when measuring the shape of the object to be measured, the shape measurement including the marks is performed. The center points of the landmarks are calculated based on the shape data obtained by the first calculation unit, and the line obtained by connecting the center points of each landmark is set as the central axis of the object to be measured. The shape of is calculated based on the amount of displacement from the first calculation section. As a result, even if the central axis of the object to be measured and the axial direction of the moving mechanism are not exactly aligned, errors caused by the deviation can be corrected when calculating the shape.

[Embodiments of the invention] An embodiment of the present invention will be described below with reference to the drawings.

In FIGS. 1 and 2, la and lb are a pair of upper and lower optical sensors that respectively irradiate laser beams onto both surfaces of the object to be measured 5 and detect the incident position of the reflected light.
They are arranged at the tip of a U-shaped support mechanism 4 facing each other from above and below, and are moved relative to the object to be measured 5 in the X-axis direction and Y-axis direction by the movement mechanisms 2 and 3 via the support mechanism 4, respectively. It is now possible to do so.

In addition, each optical sensor la, lb is arranged g6a,
6b to the first calculation units 7a, 7b, and each of the first calculation units 7a, 7b and the moving mechanisms 2, 3,
It is connected to the second arithmetic unit 11A via wires 8a, 8b, etc.

Here, the first calculation units 7a and 7b calculate the amount of displacement between the incident position of the reflected light detected by the optical sensors la and lb and a known reference detection point, respectively, and the second calculation unit 11A converts the displacement amount calculated by each of the first calculation units 7a and 7b into the shape of the object to be measured 5 using a procedure described later.

In FIGS. 1 and 2, reference numeral 12 indicates a predetermined central axis direction of the measured object 5 so that the predetermined central axis direction of the measured object 5 in the shape data when measuring the shape of the measured object 5 is clear. This mark 12 is located at the optical sensor l.
They have a cylindrical shape with a thickness in the height direction that can be detected by a and lb, and in this embodiment, two are arranged. Further, 13 is a transparent glass for supporting the object to be measured 5, and 14 is a support frame for supporting the entire shape measuring apparatus of this embodiment.

With the above configuration, when measuring the shape, first the optical sensor l
a and lb are moved in the X-axis direction above and below the object to be measured 5 by the moving mechanism 2, and the optical sensors 1a and lb change the distance between each optical sensor la and lb and the object to be measured 5 in the X-axis direction. It is measured at regular intervals, and the measured data is calculated by the first calculation sections 7a and 7b.

At this time, if the optical sensors la and lb reach the mark 12 fixedly installed on the object to be measured 5, the optical sensor la
The thickness of the mark 12 is added to the distance variation between , lb and the object to be measured 5, and the thickness of the mark 12 is calculated from the variation.
The position of is confirmed.

When the measurement in the X-axis direction is completed, the optical sensor la.

After 1b is moved by a certain value in the Y-axis direction by the moving mechanism 3, the optical sensors la and lb are moved again as described above.
It is moved by the moving mechanism 2 in the X-axis direction.

By repeating such operations, measurements are taken over the entire surface of the object to be measured 5, and then the measurement data obtained by the first calculation units 7a and 7b is stored in the second calculation unit 11A. At this time, on the measurement data, the central axis of the measured object 5 is
It is tentatively input as an axis parallel to the axis.

Next, in the second calculation unit 11A, the shape of the upper and lower surfaces of the object to be measured 5 is calculated based on the shape measurement data of each part. At this time, the position of the mark 12 installed on the object to be measured 5 is calculated. is confirmed from the distance variation, and the shape is calculated using the axial direction connecting the center positions as the center axis of the measured object doctor 5. As a result, the deviation from the tentative central axis direction of the measuring device that has been input by the measuring device is calculated, and the shape measurement data is corrected.

As described above, according to the apparatus of the present embodiment, when measuring the shape of the object to be measured 5, the central axis of the object to be measured 5 does not have to be precisely aligned with the central axis direction of the measuring device, and the shape can be calculated easily. By determining the predetermined central axis direction of the object to be measured 5 from the position of the mark 12 placed on the object to be measured S, it is possible to perform a correction calculation to match the axial direction of the measuring device with the axial direction of the object to be measured 5. Therefore, shape measurement errors caused by misalignment between the central axis of the measuring device and the object to be measured 5 can be removed, and the shape of the object to be measured 5 can be measured with extremely high accuracy.

[Effects of the Invention] As described above, according to the present invention, in order to calculate the center axis of the object to be measured from the measurement data when measuring the shape of the object to be measured, the direction of the measurement center axis of the measuring device is calculated from the shape measurement data. This has the effect of allowing the shape of the object to be measured to be measured with high precision.

[Brief explanation of the drawing]

FIG. 1 is a schematic configuration diagram showing an optical shape measuring device according to an embodiment of the present invention, FIG. 2 is a perspective view showing an enlarged main part of the device of the above embodiment, and FIG. 3 is a schematic diagram showing a conventional device. FIG. In the figure, la, lb - optical sensor, 2, 3 movement mechanism,
7 a', 7 b-first calculation section, 11A-second calculation section, 12-mark. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.

Claims (1)

[Scope of Claims] An optical sensor that irradiates a measured object with a laser beam and detects the incident position of the reflected light, and a displacement between the incident position of the reflected light detected by the optical sensor and a known reference detection point. a first calculation section connected to the optical sensor to calculate the amount; a second calculation section that converts the displacement amount calculated by the first calculation section into the shape of the object to be measured; In an optical shape measuring device comprising a moving mechanism for moving relative to the object to be measured, when measuring the shape of the object to be measured, there is a part that can be detected by the optical sensor along a predetermined central axis direction of the object to be measured. When arranging a plurality of marks and converting the shape of the object to be measured in the second calculation section, a line connecting the centers of the plurality of marks is set as a predetermined central axis direction of the object to be measured. An optical shape measuring device, characterized in that the shape of the object to be measured is calculated based on the amount of displacement from the first calculation section.