JPS632228A - 金属イオン源 - Google Patents

金属イオン源

Info

Publication number
JPS632228A
JPS632228A JP61146337A JP14633786A JPS632228A JP S632228 A JPS632228 A JP S632228A JP 61146337 A JP61146337 A JP 61146337A JP 14633786 A JP14633786 A JP 14633786A JP S632228 A JPS632228 A JP S632228A
Authority
JP
Japan
Prior art keywords
needle
reservoir
anode
metal
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61146337A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542094B2 (enrdf_load_stackoverflow
Inventor
Akira Nadaguchi
灘口　明
Takao Kato
隆男 加藤
Kazuo Hirata
和男 平田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP61146337A priority Critical patent/JPS632228A/ja
Publication of JPS632228A publication Critical patent/JPS632228A/ja
Publication of JPH0542094B2 publication Critical patent/JPH0542094B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP61146337A 1986-06-23 1986-06-23 金属イオン源 Granted JPS632228A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61146337A JPS632228A (ja) 1986-06-23 1986-06-23 金属イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61146337A JPS632228A (ja) 1986-06-23 1986-06-23 金属イオン源

Publications (2)

Publication Number Publication Date
JPS632228A true JPS632228A (ja) 1988-01-07
JPH0542094B2 JPH0542094B2 (enrdf_load_stackoverflow) 1993-06-25

Family

ID=15405409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61146337A Granted JPS632228A (ja) 1986-06-23 1986-06-23 金属イオン源

Country Status (1)

Country Link
JP (1) JPS632228A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH056663U (ja) * 1991-06-28 1993-01-29 株式会社島津製作所 含浸電極型金属イオン源

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7121955B1 (ja) * 2021-04-30 2022-08-19 長野油機株式会社 マンホールの耐震構造、その構築方法、及び構築方法の実施に供される切削装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH056663U (ja) * 1991-06-28 1993-01-29 株式会社島津製作所 含浸電極型金属イオン源

Also Published As

Publication number Publication date
JPH0542094B2 (enrdf_load_stackoverflow) 1993-06-25

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